Improved wavefront reconstruction using difference Zernike polynomials for two double-shearing wavefronts

被引:3
作者
Wang, Hai [1 ]
Li, Yanqiu [1 ]
Liu, Ke [1 ]
Wang, Jianfeng [1 ]
机构
[1] Beijing Inst Technol, Sch Optoelect, Minist Educ China, Key Lab Photoelect Imaging Tech & Syst, Beijing 100081, Peoples R China
来源
OPTICAL SYSTEMS DESIGN 2012 | 2012年 / 8550卷
关键词
Lateral shearing interferometer; double-shearing wavefront; wavefront reconstruction; difference Zernike polynomials; least square fitting; DISCRETE FOURIER-TRANSFORM; INTERFEROMETER; INTERFEROGRAMS; SURFACES;
D O I
10.1117/12.980897
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
To realize wavefront reconstruction for two double-shearing wavefronts produced by our studied cross phase grating lateral shearing interferometer(CPGLSI) in x and y directions, improved wavefront reconstruction using difference Zernike polynomials is studied in this paper. Firstly, the x directional double-shearing wavefronts in the x direction produced by shearing of (+1, +1), (-1, +1) orders diffraction beams and that of (+1,-1), (-1,-1) orders diffraction beams are represented respectively by the corresponding difference Zernike polynomials. Then the whole difference wavefront in x direction is represented by the half value of the sum of the above x directional double-shearing wavefronts. Similarly, the double-shearing wavefronts in the y direction produced by shearing of (+1, +1), (+1, -1) orders and that of (-1, +1), (-1,-1) orders are represented respectively by the corresponding difference Zernike polynomials. Then the whole difference wavefront in y direction is also represented by the half value of the sum of the y directional double-shearing wavefronts. Secondly, the least square fitting is used to obtain the whole wavefront. Investigations on reconstruction accuracy and reliability are carried out by numerical experiments, in which influences of different shearing amounts and noises on reconstruction accuracy are evaluated. The simulation results show that the wavefront reconstruction accuracy can all reach to high accuracy corresponding to different shearing amounts and also validate that our wavefront reconstruction technique is robust to noise.
引用
收藏
页数:8
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