Factors influencing the variation of surface acoustic wave velocity in lithium tetraborate

被引：2
作者：
Vezin, V
Inui, S
Yamaguchi, K
Sugawara, T
Komatsu, R
Uda, S
Yamanouchi, K
机构：
[1] TOHOKU UNIV,ELECT COMMUN RES INST,AOBA KU,SENDAI,MIYAGI 980,JAPAN
[2] MITSUBISHI MAT CO LTD,ELECT TECHNOL RES CTR,OMIYA,SAITAMA 368,JAPAN
[3] TOHOKU UNIV,ELECT COMMUN RES INST,SENDAI,MIYAGI 980,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 5B期
关键词：
lithium tetraborate; SAW velocity; crystalline defects; SAW resonator; impurity;
D O I：
10.1143/JJAP.36.3074
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Comparison of the resonance frequency of surface acoustic wave (SAW) resonators fabricated on defect-free and highly defective lithium tetraborate wafers was attempted. The intrinsic variation of SAW velocity due to crystal defects, impurities and chemical compositional inhomogeneities for lithium tetraborate wafers is smaller than +/-0.011%. In addition, the variation of SAW velocity in a wafer is influenced by the device fabrication process rather than the lithium tetraborate substrate quality.
引用
收藏
页码：3074 / 3075
页数：2
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