Development of wire-connected mechanism for precise positioning

被引:0
作者
Shinoda, Masahiro [1 ]
Hirata, Shinnosuke [1 ]
Aoyama, Hisayuki [1 ]
机构
[1] Univ Electrocommun, Dept Mech Engn & Intelligent Syst, Chofu, Tokyo 1828585, Japan
来源
EMERGING TECHNOLOGY IN PRECISION ENGINEERING XIV | 2012年 / 523-524卷
关键词
Piezoelectric Actuator; Wire-Connected System; Precise Positioning;
D O I
10.4028/www.scientific.net/KEM.523-524.645
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Micro/nano positioning is one of important techniques to operate bio-cell and micro assembly. For realizing the precise positioning, the various piezo-driven stages have been already proposed and micro/nano scale resolution has been achieved. However, it is pointed out that the existing precision positioning tools are too large compared to operating area. Their devices are too difficult to combine other devices and use in tight environment under microscope. In this paper, a wire connected mechanism for precise positioning under microscope is proposed. The proposed positioning system is simply composed actuators including piezoelectric element and super extra-fine wires. By applying wire connected mechanism, the saving of larger work space compared to traditional devices is expected.
引用
收藏
页码:645 / 649
页数:5
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