INTEGRATION OF EWOD PUMPING DEVICE IN DEEP MICROFLUIDIC CHANNELS USING A THREE-DIMENSIONAL SHADOWMASK

被引：0
|
作者：
Morishita, S. [1 ]
Kubota, M. [1 ]
Mita, Y. [1 ]
机构：
[1] Univ Tokyo, Tokyo 1138654, Japan
来源：
2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2012年
关键词：
ELECTROWETTING-BASED ACTUATION; ON-A-CHIP; FABRICATION; DROPLETS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A droplet propulsion system based on the electrowetting-on-dielectric (EWOD) is integrated in deep-trench microfluidic channels. Due to the unique three-dimensional multi-height silicon shadowmask, electrodes are simultaneously fabricated on the top, bottom and vertical walls of deep channels, thus enabling three-face EWOD driving by both the bottom and sidewalls. We have successfully moved a water droplet in a 230 mu m-deep, 750 mu m-wide trench by EWOD.
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页数：4
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