INTEGRATION OF EWOD PUMPING DEVICE IN DEEP MICROFLUIDIC CHANNELS USING A THREE-DIMENSIONAL SHADOWMASK

被引：0

作者：

Morishita, S. ^{[1
]}

Kubota, M. ^{[1
]}

Mita, Y. ^{[1
]}

机构：

[1] Univ Tokyo, Tokyo 1138654, Japan

来源：

2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2012年

关键词：

ELECTROWETTING-BASED ACTUATION; ON-A-CHIP; FABRICATION; DROPLETS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A droplet propulsion system based on the electrowetting-on-dielectric (EWOD) is integrated in deep-trench microfluidic channels. Due to the unique three-dimensional multi-height silicon shadowmask, electrodes are simultaneously fabricated on the top, bottom and vertical walls of deep channels, thus enabling three-face EWOD driving by both the bottom and sidewalls. We have successfully moved a water droplet in a 230 mu m-deep, 750 mu m-wide trench by EWOD.

引用

页数：4