共 41 条
[1]
Crossing the Resolution Limit in Near-Infrared Imaging of Silicon Chips: Targeting 10-nm Node Technology
[J].
PHYSICAL REVIEW X,
2015, 5 (02)
[4]
Birge B., 2003, SIS, P973
[8]
A complete and computationally efficient numerical model of aplanatic solid immersion lens scanning microscope
[J].
OPTICS EXPRESS,
2013, 21 (12)
:14316-14330
[10]
Dictionary-based image reconstruction for superresolution in integrated circuit imaging
[J].
OPTICS EXPRESS,
2015, 23 (11)
:15072-15087