Inner-shell filling and X-ray emission of Ar17+ ion in grazing incidence on an Al (111) surface

Based on "length and energy scale matching" theory, we put forward a model for the Ar17+ ion in grazing incidence on an Al surface. Using the model and a more detailed side feeding rate, the inner-shell filling and X-ray emission of the incident Ar17+ ion are minutely studied. The results show that the final charged state of the ion gradually increases with increasing incident velocity, which is in accordance with experimental results. The central energies of K X-ray lines (K-alpha and K-beta) are mainly influenced by the vertical energy of the ion, that is, for a given incident angle the X-ray spectrum from the ion with bigger incident energy is dominated by the decay of the ion with fewer L- and M-shell vacancies. However, the intensity of the lines depends not only on the vertical velocity, but also the horizontal velocity of the incident ion. In addition, both of the K X-ray lines have large widths, which shows that they are emitted from an ion with a broad spectrum of L- and M-shell populations.