The energy-dispersive reflectometer diffractometer at BESSY-I

被引:20
作者
Neissendorfer, F
Pietsch, U
Brezesinski, G
Möhwald, H
机构
[1] Univ Potsdam, Inst Phys, D-14469 Potsdam, Germany
[2] Max Planck Inst Colloids & Interfaces, D-12489 Berlin, Germany
关键词
lattice parameter; layer thickness; interface roughness; x-ray reflectometry; x-ray diffraction; time-resolved structural analysis of thin films and multilayers; process control of thin film covering;
D O I
10.1088/0957-0233/10/5/003
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We describe the set-up of an energy-dispersive reflectometer installed at the 6 T wavelength shifter (WLS) of the storage ring BESSY-I. It can be used for reflectometry and in-plane diffraction studies of thin films under ambient conditions. Due to the exponential decay of the incident spectrum, the whole useful energy range between 3 keV < E < 35 keV is not available simultaneously. Absorbing the highly-intensive low-energy part of the spectrum, the specular reflectivity can be recorded up to q(z) > 12.5 nm(-1) using maximum angles of incidence and exit of alpha(i) = alpha(f) approximate to 2 degrees. Up to q(z) = 5 nm(-1) the intensity is high enough to detect small angle Bragg peaks of a fatty acid salt multilayer separated by Delta E = 2 pi/(d alpha(i)), (d is the multilayer period) in about 15 s with sufficient counting statistics. After normalization by the incident spectrum the energy-dispersive reflectivity spectrum provides information similar to that from an angular-dispersive experiment, but in a much shorter time. Besides the specular reflectivity, our set-up provides the possibility of simultaneous measurement of the in-plane momentum transfer (grazing incidence diffraction). For in-plane lattice parameter measurements a second detector is attached on a circle perpendicular to the plane of incidence. As in the angular-dispersive set-up, it enables investigation of the in-plane arrangement of a fatty acid salt multilayer in about 15 s. Keeping the in-plane Bragg angle (2 Theta approximate to 30 degrees) fixed, the respective in-plane Bragg peaks appear for different energies and can be selected by changing alpha(i).
引用
收藏
页码:354 / 361
页数:8
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