Infiltration and inversion of holographically defined polymer photonic crystal templates by atomic layer deposition

被引：75
作者：
King, Jeffrey S.
Graugnard, Elton
Roche, Olivia M.
Sharp, David N.
Scrimgeour, Jan
Denning, Robert G.
Turberfield, Andrew J.
Summers, Christopher J. [1 ]
机构：
[1] Georgia Inst Technol, Sch Mat Sci & Engn, Atlanta, GA 30332 USA
[2] Univ Oxford, Dept Phys, Oxford OX1 3PU, England
[3] Univ Oxford, Inorgan Chem Lab, Oxford OX1 3QR, England
来源：
ADVANCED MATERIALS | 2006年 / 18卷 / 12期
基金：
英国工程与自然科学研究理事会;
关键词：
D O I：
10.1002/adma.200502287
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Practical methods of microfabrication are vital for the development of photonic-crystal-based signal processing. However, extension of the optical methods that dominate integrated circuit fabrication to three dimensions is challenging. This communication reports an essential step for creation of devices operating within a full photonic band gap: atomic layer deposition is used to create the high-index TiO2 replicas of holographically defined photonic crystals shown in the figure.
引用
收藏
页码：1561 / +
页数：6
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