Dispersion model for optical constants of a-Si:H

被引：7
|
作者：
He, Jian [1 ]
Xu, Rui [1 ]
Li, Wei [1 ]
Qi, Kang-Cheng [2 ]
Jiang, Ya-Dong [1 ]
机构：
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
[2] Univ Elect Sci & Technol China, Sch Optoelect Informat, Chengdu 610054, Peoples R China
来源：
PHYSICA B-CONDENSED MATTER | 2013年 / 431卷
关键词：
Optical constants; a-Si:H; PECVD; Forouhi-Bloomer; Tauc-Lorentz; AMORPHOUS-SILICON;
D O I：
10.1016/j.physb.2013.09.012
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
The optical constants of hydrogenated amorphous silicon (a-Si:H) deposited by plasma enhanced chemical vapor deposition (PECVD) have been obtained using the Forouhi-Bloomer (FB) model and the Tauc-Lorentz (TL) model, respectively. It is indicated that there are some discrepancies between the results derived from the FB model and the TL model. Based on the theory background of the two models, a detailed analysis on these discrepancies has been carried out. Finally, we have proposed a modified FB model to reduce the physical imperfection of the original FB model. This model can better fit the optical constants of a wide variety of amorphous silicon with different microstructures. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码：120 / 126
页数：7
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