Ion beam induced mixing at Co/Si interface

被引：7

作者：

Agarwal, Garima ^{[1
]}

Sharma, Pratibha ^{[1
]}

Jain, Ankur ^{[1
]}

Lal, Chhagan ^{[1
]}

Kabiraj, D. ^{[2
]}

Jain, I. P. ^{[1
]}

机构：

[1] Univ Rajasthan, Ctr Nonconvent Energy Resources, Jaipur 302004, Rajasthan, India

[2] Inter Univ Accelerator Ctr, New Delhi, India

来源：

VACUUM | 2008年 / 83卷 / 02期

关键词：

Interface; Silicide; Ion beam mixing; Electronic excitation; RBS;

D O I：

10.1016/j.vacuum.2008.05.016

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ion beam mixing has emerged as a technique for understanding reactivity and chemistry at metal/Si interface and may find its applications in the field of microelectronics. We have investigated ion beam mixing at Co/Si interface induced by electronic excitation using 120 MeV Au+9 ion irradiation at different fluences, varying from 10(12) to 10(14) ions/cm(2). Mixing was investigated by Rutherford Backscattering Spectroscopy (RBS) as a function of ion fluence and its mechanism across the interface is explained by the thermal spike model. (C) 2008 Elsevier Ltd. All rights reserved.

引用

页码：397 / 400

页数：4

共 19 条

[11] ION MIXING KINETICS STUDY BY INSITU RESISTANCE MEASUREMENTS IN THE AU/SI SYSTEM
LI, J
ALLEN, LH
MAYER, JW
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 36 (02) : 153 - 156
[12] MAEX K, 1993, MAT SCI ENG R, V11, P55
[13] Modi BP, 2005, INDIAN J PURE AP PHY, V43, P184
[14] Reddy VR, 2004, INDIAN J PURE AP PHY, V42, P361
[15] SEITZ F, 1956, SOLID STATE PHYS, V2, P305
[16] ATOMIC TRANSPORT AND PHASE-FORMATION IN THE SB/AL SYSTEM INDUCED BY HEAVY-ION BOMBARDMENT
SHI, FY
BOLSE, W
LIEB, KP
[J]. JOURNAL OF APPLIED PHYSICS, 1995, 78 (04) : 2303 - 2310
[17] THE S(E) SENSITIVITY OF METALS UNDER SWIFT-HEAVY-ION IRRADIATION - A TRANSIENT THERMAL-PROCESS
WANG, ZG
DUFOUR, C
PAUMIER, E
TOULEMONDE, M
[J]. JOURNAL OF PHYSICS-CONDENSED MATTER, 1994, 6 (34) : 6733 - 6750
[18] ZEIGLER JF, 1985, STOPPING RANGES IONS, V1
[19] EFFECTS OF ARSENIC ION IRRADIATION ON TI SILICIDE FORMATION
ZHENG, LR
HUNG, LS
MAYER, JW
CHOI, KW
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) : 413 - 417

← 1 2 →