A three DOF linear ultrasonic motor for transport and micropositioning

被引：16

作者：

Dembélé, S ^{[1
]}

Rochdi, K ^{[1
]}

机构：

[1] UFC, CNRS, UMR 6596, Lab Automat Besancon,ENSMM, F-25000 Besancon, France

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2006年 / 125卷 / 02期

关键词：

linear ultrasonic motor; standing wave ultrasonic motor; piezoelectric ultrasonic motor; vision based localization; micropositioning; microassembly;

D O I：

10.1016/j.sna.2005.08.001

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The paper deals with the study and use of a linear ultrasonic motor at low voltages. Standing waves are generated in a 64 mm x 38 mm x 2.5 mm vibrator by 20 piezoelectric ceramics and converted into sliding motions by the friction between four legs and the worktop: translations and rotations are achieved. The speed of the motor is studied according to the amplitude and frequency of the driving voltage as well as the mass of the load. Then, a model of the system is retrieved for some set points and validated using a position control. According to its interesting performances for transport and positioning, the motor is used to motorize a moving palet for the transfer of parts in a microassembly workcell. (c) 2005 Published by Elsevier B.V.

引用

页码：486 / 493

页数：8

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