Design and experiment of a touch mode MEMS capacitance vacuum gauge with square diaphragm

被引：22

作者：

Han, Xiaodong ^{[1
]}

Xu, Mahui ^{[1
]}

Li, Gang ^{[2
]}

Yan, Huangping ^{[1
]}

Feng, Yongjian ^{[1
]}

Li, Detian ^{[1
,2
]}

机构：

[1] Xiamen Univ, Sch Aerosp Engn, Xiamen 361102, Fujian, Peoples R China

[2] Lanzhou Inst Phys, Sci & Technol Vacuum Technol & Phys Lab, Lanzhou 730000, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2020年 / 313卷

基金：

中国国家自然科学基金;

关键词：

MEMS; Touch mode; Square diaphragm; Capacitance vacuum gauge; PRESSURE; SENSORS;

D O I：

10.1016/j.sna.2020.112154

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a touch mode MEMS capacitance diaphragm gauge for differential pressure measurement. The design principle of the gauge is demonstrated, then the diaphragm deflection and capacitance sensitivity are analyzed theoretically. Experimental work was carried out using a principle prototype, which has a square pressure-sensing diaphragm with large width-to-thickness ratio. The test results are consistent with the theoretical model for pressure from 1 Pa to 1000 Pa, and the capacitance-pressure curve of the gauge is near linear in three pressure sections and a maximum sensitivity of 135 fF/Pa is achieved in low pressure range. Moreover, high pressure test results ranging from 1000 Pa to atmospheric pressure indicate that the developed touch mode gauge has wide load range and good overload protection. (C) 2020 Elsevier B.V. All rights reserved.

引用

页数：6

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