Femtosecond laser-induced periodic surface structures

被引：699

作者：

Bonse, J. ^{[1
]}

Krueger, J. ^{[1
]}

Hoehm, S. ^{[2
]}

Rosenfeld, A. ^{[2
]}

机构：

[1] BAM Bundesanstalt Mat Forsch & Prufung, D-12205 Berlin, Germany

[2] Max Born Inst Nichtlineare Opt & Kurzzeitspektros, D-12489 Berlin, Germany

来源：

JOURNAL OF LASER APPLICATIONS | 2012年 / 24卷 / 04期

关键词：

Laser-induced periodic surface structures (LIPSS); femtosecond laser ablation; ultrafast optical techniques; silicon; titanium; silica; SUBWAVELENGTH RIPPLE FORMATION; ABLATION; SILICON; NANOSTRUCTURES; IRRADIATION; PULSES; TIN;

D O I：

10.2351/1.4712658

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The formation of laser-induced periodic surface structures (LIPSS) in different materials (metals, semiconductors, and dielectrics) upon irradiation with linearly polarized fs-laser pulses (tau similar to 30-150 fs, lambda similar to 800 nm) in air environment is studied experimentally and theoretically. In metals, predominantly low-spatial-frequency-LIPSS with periods close to the laser wavelength lambda are observed perpendicular to the polarization. Under specific irradiation conditions, high-spatial-frequency-LIPSS with sub-100-nm spatial periods (similar to lambda/10) can be generated. For semiconductors, the impact of transient changes of the optical properties to the LIPSS periods is analyzed theoretically and experimentally. In dielectrics, the importance of transient excitation stages in the LIPSS formation is demonstrated experimentally using (multiple) double-fs-laser-pulse irradiation sequences. A characteristic decrease of the LIPSS periods is observed for double-pulse delays of less than 2 ps. (C) 2012 Laser Institute of America.

引用

页数：7

共 43 条

[1] Laser processing of sapphire with picosecond and sub-picosecond pulses [J].

Ashkenasi, D ;

Rosenfeld, A ;

Varel, H ;

Wahmer, M ;

Campbell, EEB .

APPLIED SURFACE SCIENCE, 1997, 120 (1-2) :65-80

[2] Superhydrophobic surfaces prepared by microstructuring of silicon using a femtosecond laser [J].

Baldacchini, Tommaso ;

Carey, James E. ;

Zhou, Ming ;

Mazur, Eric .

LANGMUIR, 2006, 22 (11) :4917-4919

[3] Femtosecond laser-induced subwavelength ripples on Al, Si, CaF2 and CR-39 [J].

Bashir, Shazia ;

Rafique, M. Shahid ;

Husinsky, Wolfgang .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2012, 275 :1-6

[4] Structure formation on the surface of indium phosphide irradiated by femtosecond laser pulses [J].

Bonse, J ;

Munz, M ;

Sturm, H .

JOURNAL OF APPLIED PHYSICS, 2005, 97 (01)

[5] Femtosecond laser ablation of silicon-modification thresholds and morphology [J].

Bonse, J ;

Baudach, S ;

Krüger, J ;

Kautek, W ;

Lenzner, M .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2002, 74 (01) :19-25

[6] Chemical, morphological and accumulation phenomena in ultrashort-pulse laser ablation of TiN in air [J].

Bonse, J ;

Sturm, H ;

Schmidt, D ;

Kautek, W .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2000, 71 (06) :657-665

[7] Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon [J].

Bonse, Joern ;

Krueger, Joerg .

JOURNAL OF APPLIED PHYSICS, 2010, 108 (03)

[8] On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses [J].

Bonse, Joern ;

Rosenfeld, Arkadi ;

Krueger, Joerg .

JOURNAL OF APPLIED PHYSICS, 2009, 106 (10)

[9] Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses [J].

Borowiec, A ;

Haugen, HK .

APPLIED PHYSICS LETTERS, 2003, 82 (25) :4462-4464

[10] Sub-damage-threshold femtosecond laser ablation from crystalline Si: surface nanostructures and phase transformation [J].

Costache, F ;

Kouteva-Arguirova, S ;

Reif, J .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 79 (4-6) :1429-1432

← 1 2 3 4 5 →