Fabrication of micro-structures on a PVDF/TiO2 nano-composite film using photocatalytic lithography

被引：15

作者：

An, Ningli ^{[1
]}

Liu, Hongzhong ^{[1
]}

Ding, Yucheng ^{[1
]}

Lu, Bingheng ^{[1
]}

Zhang, Min ^{[2
]}

机构：

[1] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China

[2] Shaanxi Univ Sci Technol, Coll Chem & Chem Engn, Xian 710021, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2012年 / 258卷 / 12期

基金：

中国国家自然科学基金;

关键词：

PVDF; TiO2; Micro-structure; Photocatalytic; Degradation; THIN-FILMS; PHASE; DEGRADATION;

D O I：

10.1016/j.apsusc.2012.01.103

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In the present study, a poly(vinylidene fluoride) (PVDF)/TiO2 nano-composite film was prepared by coating a substrate with an acetone/DMF solution, which was then evaporated at a temperature of 110 degrees C. Micro-structure patterns were fabricated on a PVDF/TiO2 nano-composite film with photocatalytic lithography. The morphological and chemical compositions of the micro-structure were investigated by optical microscope, SEM and XPS. Experimental results show that the micro-structure patterns can be directly replicated on the PVDF/TiO2 nano-composite film with photocatalytic lithography. The micro-structure is approximately 4 mu m in depth which is obtained during the water phase of the process with UV-LED irradiation in 5 h. The results indicate that the fabrication methodology can be potentially applied towards the large-scale fabrication of actuators and sensor devices. (C) 2012 Elsevier B. V. All rights reserved.

引用

页码：5052 / 5055

页数：4

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