Controlled Orientation of Block Copolymers on Defect-Free Faceted Surfaces

被引：30

作者：

Hong, Sung Woo ^{[1
]}

Voronov, Dmitriy L. ^{[2
]}

Lee, Dong Hyun ^{[2
,3
,4
]}

Hexemer, Alexander ^{[2
]}

Padmore, Howard A. ^{[2
]}

Xu, Ting ^{[3
,4
]}

Russell, Thomas P. ^{[1
]}

机构：

[1] Univ Massachusetts Amherst, Dept Polymer Sci & Engn, Amherst, MA 01003 USA

[2] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Berkeley, CA 94720 USA

[3] Univ Calif Berkeley, Dept Mat Sci & Engn, Berkeley, CA 94720 USA

[4] Univ Calif Berkeley, Dept Chem, Berkeley, CA 94720 USA

来源：

ADVANCED MATERIALS | 2012年 / 24卷 / 31期

关键词：

block copolymers; GISAXS; faceted substrates; gratings; long-range lateral ordering; GRAPHOEPITAXY; LITHOGRAPHY; FILMS;

D O I：

10.1002/adma.201201279

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The effect of a faceted surface geometry on controlling the direction of well-defined line patterns of block copolymer (BCP) microdomains over macroscopic areas is reported. Facets with asymmetric base angles can control the direction of BCP microdomains oriented either parallel or perpendicular to the facets depending on BCP film thickness.

引用

页码：4278 / +

页数：7

共 30 条

[1]

Angelescu D. A., 2003, THESIS PRINCETON U U

[2] Macroscopic orientation of block copolymer cylinders in single-layer films by shearing [J].

Angelescu, DE ;

Waller, JH ;

Adamson, DH ;

Deshpande, P ;

Chou, SY ;

Chaikin, PM .

ADVANCED MATERIALS, 2004, 16 (19) :1736-+

[3]

[Anonymous], ADV MAT

[4]

[Anonymous], 2005, INT TECHN ROADM SEM

[5] Defect-free nanoporous thin films from ABC triblock copolymers [J].

Bang, Joona ;

Kim, Seung Hyun ;

Drockenmuller, Eric ;

Misner, Matthew J. ;

Russell, Thomas P. ;

Hawker, Craig J. .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2006, 128 (23) :7622-7629

[6] Graphoepitaxy of self-assembled block copolymers on two-dimensional periodic patterned templates [J].

Bita, Ion ;

Yang, Joel K. W. ;

Jung, Yeon Sik ;

Ross, Caroline A. ;

Thomas, Edwin L. ;

Berggren, Karl K. .

SCIENCE, 2008, 321 (5891) :939-943

[7] Nanostructure engineering by templated self-assembly of block copolymers [J].

Cheng, JY ;

Mayes, AM ;

Ross, CA .

NATURE MATERIALS, 2004, 3 (11) :823-828

[8] Templated Self-Assembly of Square Symmetry Arrays from an ABC Triblock Terpolymer [J].

Chuang, Vivian P. ;

Gwyther, Jessica ;

Mickiewicz, Rafal A. ;

Manners, Ian ;

Ross, Caroline A. .

NANO LETTERS, 2009, 9 (12) :4364-4369

[9] Block copolymer monolayer structure measured with scanning force microscopy moire patterns [J].

Hexemer, A ;

Stein, GE ;

Kramer, EJ ;

Magonov, S .

MACROMOLECULES, 2005, 38 (16) :7083-7089

[10] A SAXS/WAXS/GISAXS Beamline with Multilayer Monochromator [J].

Hexemer, Alexander ;

Bras, Wim ;

Glossinger, James ;

Schaible, Eric ;

Gann, Eliot ;

Kirian, Rick ;

MacDowell, Alastair ;

Church, Matthew ;

Rude, Bruce ;

Padmore, Howard .

XIV INTERNATIONAL CONFERENCE ON SMALL-ANGLE SCATTERING (SAS09), 2010, 247

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