Thermal stability of hard transparent AlxCoCrCuFeNi oxide thin films

被引:20
作者
Chen, Ta-Kun [1 ]
Wong, Ming-Show [1 ]
机构
[1] Natl Dong Hwa Univ, Dept Mat Sci & Engn, Hualien, Taiwan
基金
美国国家科学基金会;
关键词
Multicomponent oxide; Spinel oxide; Nanocomposite; Hard oxide; Transparent oxide; Reactive sputtering;
D O I
10.1016/j.surfcoat.2008.05.023
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Multi-element AlxCoCrCuFeNi (the molar ratio of x=0.5, 1, and 2) oxide thin films were deposited by reactive sputtering of homogeneous alloy targets. The as-deposited films comprise single cubic-(c-) spinel crystalline phase. The films post-annealed at 500 degrees C for 5 h in air reveal no phase transformation and no obvious grain growth. Those post-annealed at higher temperature, 700 and 900 degrees C, show possible formation of tetragonal-(t-) and orthorhombic-(o-) spinel phases resulting in a c/t/o mixed phase as well as precipitates of copper-rich oxide nanorods on the film surface. The amount of c-spinel in the mixed phase increases with increasing x value. The density of the precipitates is dependent on both x value and annealing temperature. Hardness increases for films annealed at 500 degrees C with the highest value of hardness of 25.7 +/- 2.3 GPa. Higher annealing temperatures result in formation of cracks and holes on the films that make the nanoindentation measurements unreliable. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:495 / 500
页数:6
相关论文
共 15 条
  • [1] ARMBRUSTER T, 1983, Z KRISTALLOGR, V162, P8
  • [2] Structure and properties of reactively-sputtered AlxCoCrCuFeNi oxide films
    Chen, Ta-Kun
    Wong, Ming-Show
    [J]. THIN SOLID FILMS, 2007, 516 (2-4) : 141 - 146
  • [3] Nanostructured nitride films of multi-element high-entropy alloys by reactive DC sputtering
    Chen, TK
    Wong, MS
    Shun, TT
    Yeh, JW
    [J]. SURFACE & COATINGS TECHNOLOGY, 2005, 200 (5-6) : 1361 - 1365
  • [4] CHEN TK, 2008, THESIS NATL DONG HWA
  • [5] MOSSBAUER RESONANCE OF FE57 IN OXIDIC SPINELS CONTAINING CU AND FE
    EVANS, BJ
    HAFNER, SS
    [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1968, 29 (09) : 1573 - +
  • [6] Phase relations in the NiFe2O4-NiCr2O4-CuCr2O4 system
    Ivanov, VV
    Talanov, VM
    Shabel'skaya, NP
    [J]. INORGANIC MATERIALS, 2001, 37 (08) : 839 - 845
  • [7] CuO nanowires can be synthesized by heating copper substrates in air
    Jiang, XC
    Herricks, T
    Xia, YN
    [J]. NANO LETTERS, 2002, 2 (12) : 1333 - 1338
  • [9] Microstructure characterization of AlxCoCrCuFeNi high-entropy alloy system with multiprincipal elements
    Tong, CJ
    Chen, YL
    Chen, SK
    Yeh, JW
    Shun, TT
    Tsau, CH
    Lin, SJ
    Chang, SY
    [J]. METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 2005, 36A (04): : 881 - 893
  • [10] Composition, nanostructure and origin of the ultrahardness in nc-TiN/a-Si3N4/a- and nc-TiSi2 nanocomposites with Hv=80 to ≤ 105 GPa
    Veprek, S
    Niederhofer, A
    Moto, K
    Bolom, T
    Männling, HD
    Nesladek, P
    Dollinger, G
    Bergmaier, A
    [J]. SURFACE & COATINGS TECHNOLOGY, 2000, 133 : 152 - 159