Comparison of approaches and artefacts in the measurement of detector modulation transfer functions

被引:10
作者
Boothroyd, C. B. [1 ,2 ]
Kasama, T. [3 ]
Dunin-Borkowski, R. E. [1 ,2 ]
机构
[1] Forschungszentrum Julich, Ernst Ruska Ctr, D-52425 Julich, Germany
[2] Forschungszentrum Julich, Peter Grunberg Inst, D-52425 Julich, Germany
[3] Tech Univ Denmark, Ctr Electron Nanoscopy, DK-2800 Lyngby, Denmark
关键词
Charge-coupled device camera; Modulation transfer function; Point spread function; ELECTRON DETECTION CHARACTERISTICS; LINEAR TRANSFER THEORY; POINT-SPREAD FUNCTION; SCAN CCD CAMERA; AREA DETECTORS; NOISE TRANSFER; IMAGES; SIMULATIONS; SCATTERING; SIGNAL;
D O I
10.1016/j.ultramic.2013.03.001
中图分类号
TH742 [显微镜];
学科分类号
摘要
In order to investigate the reproducibility of measurements of transmission electron microscope detector modulation transfer functions (MTFs) we measure the MTF of a charge-coupled device (CCD) camera using five different methods. MTFs derived from a sharp edge, a circular aperture and electron holographic interference fringes are found to agree closely with one other. The difficulty of obtaining accurate measurements of MTFs and the potential of using focused electron probes to make direct measurements of MTFs is discussed. We highlight the sensitivity of image contrast after deconvolution to small differences in the measured MTF. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码:18 / 29
页数:12
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