Outgassing from stainless steel and the effects of the gauges

被引:20
作者
Bennett, JRJ [1 ]
Hughes, S [1 ]
Elsey, RJ [1 ]
Parry, TP [1 ]
机构
[1] Rutherford Appleton Lab, CCLRC, Didcot OX11 0QX, Oxon, England
关键词
vacuum; outgassing rate; methane; stainless steel; mass spectrometry; quadrupole mass analyser; NEG pump;
D O I
10.1016/j.vacuum.2003.12.012
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The true outgassing from surfaces is often masked by the production of gases and pumping within the measuring gauge. Quadrupole mass analysers have been used to measure the outgassing from carefully prepared samples of stainless steel. By using an isolation pressure rise technique coupled to non-evaporable getter pumping, the problem of production of methane by the gauge is overcome and it has been possible to measure the outgassing of methane to very low levels. The specific outgassing rate of methane from 316 L stainless steel, is found to be less than or equal to 5 x 10(-22) mbar1s(-1) cm(-2). The outgassing of the other gases has been measured using several gauges. The specific outgassing of hydrogen is found to be 4.5 x 10(-15) mbar 1 s(-1) cm(-2) and the total of all other gasses amounted to no more than 10% of this figure. Although the measurements of the other gases are more ambiguous than those for methane, it is concluded that, in all probability, only hydrogen is outgassed from stainless steel. (C) 2004 Elsevier Ltd. All rights reserved.
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页码:149 / 153
页数:5
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