Electrochemical growth of copper single crystals in pores of polymer ion-track membranes

被引：52

作者：

Dobrev, D ^{[1
]}

Vetter, J ^{[1
]}

Angert, N ^{[1
]}

Neumann, R ^{[1
]}

机构：

[1] Gesell Schwerionenforsch Inst Darmstadt, GSI, D-64291 Darmstadt, Germany

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1999年 / 69卷 / 02期

关键词：

D O I：

10.1007/s003390050995

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Copper single-crystals are grown by a galvanic method, using etched ion tracks in a polymer foil as templates. The copper deposition is carried out by reversible pulse electrolysis in an ultrasonic field. The method applied for this purpose permits fabrication of stable standing cylindrical single crystals with diameters in the nanometer and micrometer range with high aspect ratio and density of 10(5)-10(7) per cm(2) on a large area. The experimental results obtained in this way are compared with the results obtained by direct current plating under ultrasonic treatment and sole reversible electrolysis. The effects of all these deposition processes on the structure of copper claddings are shown.

引用

页码：233 / 237

页数：5

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