Laser focus positioning method with submicrometer accuracy

被引：10

作者：

Alexeev, Ilya ^{[1
,2
]}

Strauss, Johannes ^{[1
,2
]}

Groeschl, Andreas ^{[1
]}

Cvecek, Kristian ^{[2
,3
]}

Schmidt, Michael ^{[1
,2
,3
]}

机构：

[1] Univ Erlangen Nurnberg, Chair Photon Technol, D-91052 Erlangen, Germany

[2] Univ Erlangen Nurnberg, Erlangen Grad Sch Adv Opt Technol SAOT, D-91052 Erlangen, Germany

[3] Bayer Laserzentrum GmbH, D-91052 Erlangen, Germany

来源：

APPLIED OPTICS | 2013年 / 52卷 / 03期

关键词：

GENERATION; GLASS;

D O I：

10.1364/AO.52.000415

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Accurate positioning of a sample is one of the primary challenges in laser micromanufacturing. There are a number of methods that allow detection of the surface position; however, only a few of them use the beam of the processing laser as a basis for the measurement. Those methods have an advantage that any changes in the processing laser beam can be inherently accommodated. This work describes a direct, contact-free method to accurately determine workpiece position with respect to the structuring laser beam focal plane based on nonlinear harmonic generation. The method makes workpiece alignment precise and time efficient due to ease of automation and provides the repeatability and accuracy of the surface detection of less than 1 mu m. (C) 2013 Optical Society of America

引用

页码：415 / 421

页数：7

共 15 条

[1] STUDY OF DIACETYLENE MONOMER AND POLYMER MONOLAYERS USING 2ND-HARMONIC AND 3RD-HARMONIC GENERATION [J].

BERKOVIC, G ;

SUPERFINE, R ;

GUYOTSIONNEST, P ;

SHEN, YR ;

PRASAD, PN .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1988, 5 (03) :668-673

[2]

Bouwhuis G., 1985, PRINCIPLES OPTICAL D

[3] LASER-INDUCED DAMAGE OF OPTICAL ELEMENTS - STATUS REPORT [J].

GLASS, AJ ;

GUENTHER, AH .

APPLIED OPTICS, 1973, 12 (04) :637-649

[4]

JI Z, 1989, OPT LASER TECHNOL, V21, P335

[5] Filamentation of ultrashort pulse laser beams resulting from their propagation over long distances in air [J].

La Fontaine, B ;

Vidal, F ;

Jiang, Z ;

Chien, CY ;

Comtois, D ;

Desparois, A ;

Johnston, TW ;

Kieffer, JC ;

Pépin, H ;

Mercure, HP .

PHYSICS OF PLASMAS, 1999, 6 (05) :1615-1621

[6]

Liu X, 2001, US Patent, Patent No. [6303903 B1, 6303903]

[7] ELECTRON BINDING ENERGIES IN FREE ATOMS [J].

LOTZ, W .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1970, 60 (02) :206-&

[8] Characteristics of laser absorption and welding in FOTURAN glass by ultrashort laser pulses [J].

Miyamoto, Isamu ;

Cvecek, Kristian ;

Okamoto, Yasuhiro ;

Schmidt, Michael ;

Helvajian, Henry .

OPTICS EXPRESS, 2011, 19 (23) :22961-22973

[9]

Ostendorf A, 2006, PHOTONICS SPECTRA

[10] Glass welding technology using ultra short laser pulses [J].

Roth, Stephan ;

Cvecek, Kristian ;

Miyamoto, Isamu ;

Schmidt, Michael .

LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING (LAMOM) XVI, 2011, 7920

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