Laser focus positioning method with submicrometer accuracy

被引:10
作者
Alexeev, Ilya [1 ,2 ]
Strauss, Johannes [1 ,2 ]
Groeschl, Andreas [1 ]
Cvecek, Kristian [2 ,3 ]
Schmidt, Michael [1 ,2 ,3 ]
机构
[1] Univ Erlangen Nurnberg, Chair Photon Technol, D-91052 Erlangen, Germany
[2] Univ Erlangen Nurnberg, Erlangen Grad Sch Adv Opt Technol SAOT, D-91052 Erlangen, Germany
[3] Bayer Laserzentrum GmbH, D-91052 Erlangen, Germany
关键词
GENERATION; GLASS;
D O I
10.1364/AO.52.000415
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Accurate positioning of a sample is one of the primary challenges in laser micromanufacturing. There are a number of methods that allow detection of the surface position; however, only a few of them use the beam of the processing laser as a basis for the measurement. Those methods have an advantage that any changes in the processing laser beam can be inherently accommodated. This work describes a direct, contact-free method to accurately determine workpiece position with respect to the structuring laser beam focal plane based on nonlinear harmonic generation. The method makes workpiece alignment precise and time efficient due to ease of automation and provides the repeatability and accuracy of the surface detection of less than 1 mu m. (C) 2013 Optical Society of America
引用
收藏
页码:415 / 421
页数:7
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