Electro-thermal characterization and simulation of integrated multi-trenched XtreMOS™ power devices

被引:1
|
作者
Rhayem, J. [1 ]
Besbes, B. [2 ]
Blecic, R. [3 ]
Bychikhin, S. [4 ]
Haberfehlner, G. [4 ]
Pogany, D. [4 ]
Desoete, B. [1 ]
Gillon, R. [1 ]
Wieers, A. [1 ]
Tack, M. [1 ]
机构
[1] ON Semicond Belgium BVBA, Power Technol Ctr, B-9700 Oudenaarde, Belgium
[2] Univ Paris Est Marne la Vallee, F-77454 Marne La Vallee, France
[3] Univ Zagreb, HR-10002 Zagreb, Croatia
[4] Vienna Univ Technol, Inst Solid State Elect, A-1040 Vienna, Austria
关键词
3D electro-thermal simulation; lntegated power devices; SiO2; trenches;
D O I
10.1016/j.mejo.2011.09.010
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents a new methodology to characterize and simulate the electro-thermal aspects of packaged power drivers using multi-trenched XtreMOS (TM) devices. Electrical device data is collected by pulsed and DC measurements. Thermal data is collected through on-chip sensors and through a full surface high resolution transient interferometric mapping (TIM). For the first time a data driven segmented electro-thermal transient model is proposed to accurately describe the thermal profile behavior for the mutli-trenched devices. Further investigations of the thermal heating impact on the driver due to the low thermal conductivity of the trenches (SiO2) have been carried out. The results of the investigations have been discussed for two different gate to source (VGS) bias conditions: VGS below the temperature compensation point (TCP), which is a bias condition that might lead to a thermal runaway, and VGS above TCP. (C) 2011 Elsevier Ltd. All rights reserved.
引用
收藏
页码:618 / 623
页数:6
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