3D Optical Measuring Systems and Laser Technologies for Scientific and Industrial Applications

被引：14

作者：

Chugui, Yu. ^{[1
,2
,3
]}

Verkhoglyad, A. ^{[1
]}

Poleshchuk, A. ^{[4
]}

Korolkov, V. ^{[4
]}

Sysoev, E. ^{[1
]}

Zavyalov, P. ^{[1
]}

机构：

[1] Russian Acad Sci, Siberian Branch, Technol Design Inst Sci Instrument Engn, Novosibirsk 630058, Russia

[2] Novosibirsk State Univ, Novosibirsk 630090, Russia

[3] Novosibirsk State Tech Univ, Novosibirsk 630073, Russia

[4] Russian Acad Sci, Siberian Branch, Inst Automat & Electrometry, Novosibirsk 630090, Russia

来源：

MEASUREMENT SCIENCE REVIEW | 2013年 / 13卷 / 06期

关键词：

3D optical inspection; image; shadow; structured light method; low-coherent; interference; laser image generator;

D O I：

10.2478/msr-2013-0048

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Modern industry and science require novel 3D optical measuring systems and laser technologies with micro/nanometer resolution for solving actual problems. Such systems, including the 3D dimensional inspection of ceramic parts for electrotechnical industry, laser inspection of wheel pair diagnostic for running trains and 3D superresolution low-coherent micro/nanoprofilometers are presented. The newest results in the field of laser technologies for high-precision synthesis of microstructures by updated image generator using the semiconductor laser are given. The measuring systems and the laser image generator developed and produced by TDI SIE and IAE SB RAS have been tested by customers and used in different branches of industry and science.

引用

页码：322 / 328

页数：7

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