Four-Dimensional Scanning Transmission Electron Microscopy (4D-STEM): From Scanning Nanodiffraction to Ptychography and Beyond

被引:576
作者
Ophus, Colin [1 ]
机构
[1] Lawrence Berkeley Natl Lab, Mol Foundry, Natl Ctr Electron Microscopy, 1 Cyclotron Rd, Berkeley, CA 94720 USA
关键词
transmission electron microscopy (TEM); four dimensional-scanning transmission electron microscopy (4D-STEM); scanning electron nanodiffraction (SEND); nanobeam electron diffraction (NBED); DIFFERENTIAL PHASE-CONTRAST; PRIMARY-WAVE FIELDS; STRAIN ANALYSIS; IN-SITU; DIFFRACTION PATTERNS; MICRODIFFRACTION PATTERNS; HIGH-RESOLUTION; STEM; ORIENTATION; DETECTOR;
D O I
10.1017/S1431927619000497
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Scanning transmission electron microscopy (STEM) is widely used for imaging, diffraction, and spectroscopy of materials down to atomic resolution. Recent advances in detector technology and computational methods have enabled many experiments that record a full image of the STEM probe for many probe positions, either in diffraction space or real space. In this paper, we review the use of these four-dimensional STEM experiments for virtual diffraction imaging, phase, orientation and strain mapping, measurements of medium-range order, thickness and tilt of samples, and phase contrast imaging methods, including differential phase contrast, ptychography, and others.
引用
收藏
页码:563 / 582
页数:20
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