A Dual Lateral-Field-Excited Bulk Acoustic Wave Sensor Array

被引：15

作者：

Winters, Shane ^{[1
]}

Bernhardt, George ^{[1
]}

Vetelino, John F. ^{[1
]}

机构：

[1] Univ Maine, Lab Surface Sci & Technol, Orono, ME 04469 USA

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2013年 / 60卷 / 03期

基金：

美国国家科学基金会;

关键词：

QUARTZ-CRYSTAL MICROBALANCE;

D O I：

10.1109/TUFFC.2013.2598

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

Recently, there has been interest in the fabrication of multiple quartz crystal microbalances (QCMs) on a single substrate to create a sensor array. However, such devices are ultimately subject to the limitations of the QCM configuration, requiring electrodes and wires on the sensing surface of the crystal substrate, resulting in a cumbersome arrangement that is unable to detect electrical property changes. The lateral-field-excited (LFE) sensor is a novel sensing device that only requires electrodes on the back side of the substrate. With a bare sensing surface, the LFE sensor is a better choice for implementing a sensor array. The purpose of this paper is to report on the fabrication and testing of two independent LFE devices on a single substrate. The individual LFE elements are shown to respond to both electrical and mechanical property changes, with minimal crosstalk between the LFE elements.

引用

页码：573 / 578

页数：6