H2S sensing properties of WO3 based gas sensor

被引：27
|
作者：
Urasinska-Wojcik, B. [1 ]
Vincent, T. A. [1 ]
Gardner, J. W. [1 ]
机构：
[1] Univ Warwick, Sch Engn, Coventry, W Midlands, England
来源：
PROCEEDINGS OF THE 30TH ANNIVERSARY EUROSENSORS CONFERENCE - EUROSENSORS 2016 | 2016年 / 168卷
关键词：
gas sensor; H2S detection; metal oxide; sensing layer;
D O I：
10.1016/j.proeng.2016.11.181
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Semiconductor gas sensors based upon n-type WO3 nanoparticle powder were fabricated and their response from 100 ppb to ppm levels of H2S in air has been investigated. In this study, a low power MEMS based micro-hotplate was employed as the substrate and operated at a constant temperature of 350 degrees C. Experimental data demonstrate repeatable results across the range of concentrations. The devices have good response and recovery times and importantly excellent stability. Cross-sensitivities towards other reducing gases/VOCs showed that the WO3-based sensors are less sensitive to CO, acetone, H-2 and CH4 even at much higher ppm levels. (C) 2016 Published by Elsevier Ltd.
引用
收藏
页码：255 / 258
页数：4
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