High-Q and Wide Dynamic Range Inertial MEMS for North-Finding and Tracking Applications

被引：0
作者：
Trusov, Alexander A. [1 ]
Prikhodko, Igor P. [1 ]
Zotov, Sergei A. [1 ]
Shkel, Andrei M. [1 ]
机构：
[1] Univ Calif Irvine, Dept Mech & Aerosp Engn, Microsyst Lab, Irvine, CA 92697 USA
来源：
2012 IEEE/ION POSITION LOCATION AND NAVIGATION SYMPOSIUM (PLANS) | 2012年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report high-Q and wide dynamic range MEMS gyroscopes and accelerometers for development of an IMU capable of north finding and tracking. The vacuum sealed SOl gyroscope utilizes symmetric quadruple mass architecture with measured quality factors of 1.2 million and proven sub-degrees/hr Allan deviation of bias. The true north detection was accomplished in conventional amplitude modulated (AM) rate mode and showed 3 milliradian measurement uncertainty. The north (azimuth) tracking necessitates a wide dynamic range, for which the same QMG transducer is switched to a frequency modulated (FM) modality. The test results for FM operation experimentally demonstrated a wide linear input rate range of 18,000 degrees/s and inherent self-calibration against temperature changes. Vertical alignment is possible using resonant accelerometers with a projected bias error of 5 mu g and self-calibration against temperature variations, enabled by differential frequency measurements. We believe the developed low dissipation inertial MEMS with interchangeable AM/FM modalities may enable wide dynamic range IMUs for north-finding and inertial guidance applications previously limited to optical and quartz systems.
引用
收藏
页码：247 / 251
页数：5
相关论文
共 47 条
[21]   A New Low-power, High-Q, Wide Tunable CMOS Active Inductor for RF Applications [J].
Saad, Sehmi ;
Mhiri, Mongia ;
Ben Hammadi, Aymen ;
Besbes, Kamel .
IETE JOURNAL OF RESEARCH, 2016, 62 (02) :265-273
[22]   A single layer silicon-on-insulator MEMS gyroscope for wide dynamic range and harsh environment applications [J].
Kranz, M ;
Hudson, T ;
Ashley, P ;
Ruffin, P ;
Burgett, S ;
Temmen, M ;
Tuck, J .
MEMS COMPONENTS AND APPLICATIONS FOR INDUSTRY, AUTOMOBILES, AEROSPACE, AND COMMUNICATION, 2001, 4559 :5-16
[23]   Machine learning-assisted high-accuracy and large dynamic range thermometer in high-Q microbubble resonators [J].
Chen, Hao ;
Wang, Zhengyu ;
Wang, Yan ;
Yu, Changqiu ;
Niu, Rui ;
Zou, Chang-Ling ;
Lu, Jin ;
Dong, Chun-Hua ;
Ren, Hongliang .
OPTICS EXPRESS, 2023, 31 (10) :16781-16794
[24]   High-sensitivity integrated terahertz sensor with large dynamic range based on adjustable high-Q microring resonator [J].
Hou, Zhibo ;
Chen, Liao ;
Gao, Xiaoyan ;
Liu, Rongwu ;
Du, Yufan ;
Zhang, Chi ;
Wu, Xiaojun ;
Zhang, Xinliang .
APL PHOTONICS, 2024, 9 (12)
[25]   Analysis and Implementation of High-Q CT Inductor for Compact and Wide-Tuning Range Ku-Band VCO [J].
Mansour, Islam ;
Aboualalaa, Mohamed ;
Barakat, Adel ;
Allam, Ahmed ;
Abdel-Rahman, Adel B. ;
Abo-Zahhad, Mohammed ;
Pokharel, Ramesh K. .
IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, 2020, 30 (08) :802-805
[26]   A novel high-Q and wide-frequency-range inductor using Si 3-D MMIC technology [J].
Kamogawa, K ;
Nishikawa, K ;
Toyoda, I ;
Tokumitsu, T ;
Tanaka, M .
IEEE MICROWAVE AND GUIDED WAVE LETTERS, 1999, 9 (01) :16-18
[27]   Dynamic metamaterial based on the graphene split ring high-Q Fano-resonnator for sensing applications [J].
Tang, Weiwei ;
Wang, Lin ;
Chen, Xiaoshuang ;
Liu, Changlong ;
Yu, Anqi ;
Lu, Wei .
NANOSCALE, 2016, 8 (33) :15196-15204
[28]   High Sensitivity and Wide Dynamic Range Thermoresistive Micro Calorimetric Flow Sensor With CMOS MEMS Technology [J].
Xu, Wei ;
Wang, Xiaoyi ;
Chiu, Yi ;
Lee, Yi-Kuen .
IEEE SENSORS JOURNAL, 2020, 20 (08) :4104-4111
[29]   High-Q 3 b/4 b RF MEMS Digitally Tunable Capacitors for 0.8-3 GHz Applications [J].
Patel, Chirag D. ;
Rebeiz, Gabriel M. .
IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, 2012, 22 (08) :394-396
[30]   Vision Models for High Dynamic Range and Wide Colour Gamut Imaging: Techniques and Applications [J].
不详 .
JOURNAL OF PRINT AND MEDIA TECHNOLOGY RESEARCH, 2019, 8 (04) :244-244
12345