High-Q and Wide Dynamic Range Inertial MEMS for North-Finding and Tracking Applications

被引：0

作者：

Trusov, Alexander A. ^{[1
]}

Prikhodko, Igor P. ^{[1
]}

Zotov, Sergei A. ^{[1
]}

Shkel, Andrei M. ^{[1
]}

机构：

[1] Univ Calif Irvine, Dept Mech & Aerosp Engn, Microsyst Lab, Irvine, CA 92697 USA

来源：

2012 IEEE/ION POSITION LOCATION AND NAVIGATION SYMPOSIUM (PLANS) | 2012年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report high-Q and wide dynamic range MEMS gyroscopes and accelerometers for development of an IMU capable of north finding and tracking. The vacuum sealed SOl gyroscope utilizes symmetric quadruple mass architecture with measured quality factors of 1.2 million and proven sub-degrees/hr Allan deviation of bias. The true north detection was accomplished in conventional amplitude modulated (AM) rate mode and showed 3 milliradian measurement uncertainty. The north (azimuth) tracking necessitates a wide dynamic range, for which the same QMG transducer is switched to a frequency modulated (FM) modality. The test results for FM operation experimentally demonstrated a wide linear input rate range of 18,000 degrees/s and inherent self-calibration against temperature changes. Vertical alignment is possible using resonant accelerometers with a projected bias error of 5 mu g and self-calibration against temperature variations, enabled by differential frequency measurements. We believe the developed low dissipation inertial MEMS with interchangeable AM/FM modalities may enable wide dynamic range IMUs for north-finding and inertial guidance applications previously limited to optical and quartz systems.

引用

页码：247 / 251

页数：5

共 46 条

[1] A high-Q and wide-dynamic-range CMOS IF bandpass filter for monolithic receivers
Choi, YW
Luong, HC
ISCAS 2000: IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS - PROCEEDINGS, VOL II: EMERGING TECHNOLOGIES FOR THE 21ST CENTURY, 2000, : 144 - 147
[2] A CENTRALLY-ANCHORED HIGH-Q TUNABLE PIEZOELECTRIC MEMS RESONATORS FOR WIDE TEMPERATURE RANGE RTC
Long, Yaoyao
Liu, Zhenming
Wehner, Charlotte
Ayazi, Farrokh
2023 IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS, INERTIAL, 2023,
[3] Low voltage, high-Q SOI MEMS varactors for RE applications
Yalçinkaya, AD
Jensen, S
Hansen, O
ESSCIRC 2003: PROCEEDINGS OF THE 29TH EUROPEAN SOLID-STATE CIRCUITS CONFERENCE, 2003, : 607 - 610
[4] Digitally controllable variable HIGH-Q MEMS capacitor for RF applications
Hoivik, N
Michalicek, MA
Lee, YC
Gupta, KC
Bright, VM
2001 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3, 2001, : 2115 - 2118
[5] NORTH-FINDING WITH 0.004 RADIAN PRECISION USING A SILICON MEMS QUADRUPLE MASS GYROSCOPE WITH Q-FACTOR OF 1 MILLION
Prikhodko, I. P.
Trusov, A. A.
Shkel, A. M.
2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012,
[6] Characterization and control of a high-Q MEMS inertial sensor using low-cost hardware
Gregory, J. A.
Cho, J.
Najafi, K.
2012 IEEE/ION POSITION LOCATION AND NAVIGATION SYMPOSIUM (PLANS), 2012,
[7] A high-Q and wide-dynamic-range 70-MHz CMOS bandpass filter for wireless receivers
Choi, YW
Luong, HC
IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS II-ANALOG AND DIGITAL SIGNAL PROCESSING, 2001, 48 (05): : 433 - 440
[8] Analysis and design of a high-Q differential active inductor with wide tuning range
Li, C.
Gong, F.
Wang, P.
IET CIRCUITS DEVICES & SYSTEMS, 2010, 4 (06) : 486 - 495
[9] Design of Spring Coupling for High-Q High-Frequency MEMS Filters for Wireless Applications
Shalaby, Mohammed M.
Abdelmoneum, Mohamed A.
Saitou, Kazuhiro
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 2009, 56 (04) : 1022 - 1030
[10] Design of a high-Q CMOS-compatible MEMS tunable capacitor for RF applications
Nasirzadeh, N
Abbaspour, E
Dadashzadeh, G
THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICRO-ELECTRONICS AND MICRO-SYSTEMS, 2005, : 335 - 337

← 1 2 3 4 5 →