Photonic crystals for the visible spectrum by holographic lithography

被引:53
作者
Sharp, DN
Campbell, M
Dedman, ER
Harrison, MT
Denning, RG
Turberfield, AJ
机构
[1] Univ Oxford, Dept Phys, Clarendon Lab, Oxford OX1 3PU, England
[2] Univ Oxford, Dept Chem, Inorgan Chem Lab, Oxford OX1 3QR, England
[3] Corning Res Ctr, Martlesham Heath IP5 3RE, Ipswitch, England
基金
英国工程与自然科学研究理事会;
关键词
holographic lithography; photonic crystal; SU8;
D O I
10.1023/A:1013387015192
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We describe a general and flexible technique for the fabrication of three-dimensional photonic crystals that is particularly well adapted to the production of structures with the sub-micron periodicity required for applications in the visible optical spectrum. Three-dimensional microstructure is generated by using a four-beam laser interference pattern to expose a thick layer of photoresist. Exposed areas are rendered insoluble; unexposed areas are dissolved away leaving a three-dimensional photonic crystal formed of cross-linked polymer with air-filled voids. The polymeric structure may be used as a template for the production of photonic crystals with higher refractive index contrast. Photonic crystals made of polymer and of TiO2 have been characterized by scanning electron microscopy and by optical diffraction measurements.
引用
收藏
页码:3 / 12
页数:10
相关论文
共 42 条
[1]   Photonic band gaps and holography [J].
Berger, V ;
GauthierLafaye, O ;
Costard, E .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (01) :60-64
[2]   Fabrication of photonic crystals for the visible spectrum by holographic lithography [J].
Campbell, M ;
Sharp, DN ;
Harrison, MT ;
Denning, RG ;
Turberfield, AJ .
NATURE, 2000, 404 (6773) :53-56
[3]   A7 STRUCTURE - A FAMILY OF PHOTONIC CRYSTALS [J].
CHAN, CT ;
DATTA, S ;
HO, KM ;
SOUKOULIS, CM .
PHYSICAL REVIEW B, 1994, 50 (03) :1988-1991
[4]   Fabrication of photonic band-gap crystals [J].
Cheng, CC ;
Scherer, A .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (06) :2696-2700
[5]   Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication [J].
Cumpston, BH ;
Ananthavel, SP ;
Barlow, S ;
Dyer, DL ;
Ehrlich, JE ;
Erskine, LL ;
Heikal, AA ;
Kuebler, SM ;
Lee, IYS ;
McCord-Maughon, D ;
Qin, JQ ;
Röckel, H ;
Rumi, M ;
Wu, XL ;
Marder, SR ;
Perry, JW .
NATURE, 1999, 398 (6722) :51-54
[6]   ANOMALOUS SPONTANEOUS STIMULATED-DECAY PHASE-TRANSITION AND ZERO-THRESHOLD LASER ACTION IN A MICROSCOPIC CAVITY [J].
DEMARTINI, F ;
JACOBOVITZ, GR .
PHYSICAL REVIEW LETTERS, 1988, 60 (17) :1711-1714
[7]   Fabrication of photonic crystals by deep x-ray lithography [J].
Feiertag, G ;
Ehrfeld, W ;
Freimuth, H ;
Kolle, H ;
Lehr, H ;
Schmidt, M ;
Sigalas, MM ;
Soukoulis, CM ;
Kiriakidis, G ;
Pedersen, T ;
Kuhl, J ;
Koenig, W .
APPLIED PHYSICS LETTERS, 1997, 71 (11) :1441-1443
[8]   Photonic-bandgap microcavities in optical waveguides [J].
Foresi, JS ;
Villeneuve, PR ;
Ferrera, J ;
Thoen, ER ;
Steinmeyer, G ;
Fan, S ;
Joannopoulos, JD ;
Kimerling, LC ;
Smith, HI ;
Ippen, EP .
NATURE, 1997, 390 (6656) :143-145
[9]   QUANTIZED MOTION OF COLD CESIUM ATOMS IN 2-DIMENSIONAL AND 3-DIMENSIONAL OPTICAL POTENTIALS [J].
GRYNBERG, G ;
LOUNIS, B ;
VERKERK, P ;
COURTOIS, JY ;
SALOMON, C .
PHYSICAL REVIEW LETTERS, 1993, 70 (15) :2249-2252
[10]   EXISTENCE OF A PHOTONIC GAP IN PERIODIC DIELECTRIC STRUCTURES [J].
HO, KM ;
CHAN, CT ;
SOUKOULIS, CM .
PHYSICAL REVIEW LETTERS, 1990, 65 (25) :3152-3155