Design and Modeling of a 2-DOF Decoupled Rotation Platform for Micro-manipulation

In high precision micro-manipulation task, precision angle adjustment is very important, which directly affects the quality of micro-manipulation. In this paper a novel 2-DOF (degree of freedom) rotation platform driven by two piezoelectric (PZT) actuators is designed to realize precision angle adjustment. The rotation platform has compact flexure-based mechanical structure and light weight. The rotation decoupling in X- and Y- axes are realized through the Hook joint. In order to obtain large range rotational angle, bridge-type mechanism is utilized in the 2-DOF rotation platform. An analytical model for rotational angle and input stiffness calculation is established. The influences of key parameters on the rotational angle as well as input stiffness of the rotation platform are analyzed. Finite element analysis (FEA) is conducted to evaluate the analytical model. The results of FEA fit the analytical model well and show the rotation platform exhibits good performance.