Accurate computation of magnetic lenses with FOFEM

被引:13
作者
Lencová, B [1 ]
机构
[1] Acad Sci Czech Republ, Inst Sci Instruments, Brno 61264, Czech Republic
关键词
potential and field computations; finite element method; magnetic lenses; saturated magnetic lenses; accuracy of field computation;
D O I
10.1016/S0168-9002(98)01551-4
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
First-order finite element method (FOFEM) is used for computations of rotationally symmetric magnetic electron lenses with saturated materials. An overview of local and global errors in the axial Aux density distribution in the first-order finite element method is given, and the coefficient computation in FOFEM providing the best axial fields are shown. The quality of computed results is illustrated on several typical problems. It is shown that with graded dense mesh accurate results can be obtained fast and with small memory requirements. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:329 / 337
页数:9
相关论文
共 20 条
[1]   FIELD-EVALUATION FROM POTENTIALS CALCULATED BY THE FINITE-ELEMENT METHOD FOR RAY TRACING - THE SLICE METHOD [J].
BARTH, JE ;
LENCOVA, B ;
WISSELINK, G .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1990, 298 (1-3) :263-268
[2]  
Binns K.J., 1992, The Analytical and Numerical Solution of Electric and Magnetic Fields
[3]  
HILL R, 1981, I PHYS C SER, V61, P71
[4]   FINITE-ELEMENT SOLUTIONS FOR DEVICES WITH PERMANENT-MAGNETS [J].
KAMMINGA, W .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1975, 8 (07) :841-855
[5]   ADVANCED 9-POINT FORMULAS FOR THE DISCRETIZATION OF POISSON EQUATION [J].
KASPER, E .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1990, 298 (1-3) :295-295
[6]  
Lencova B., 1986, Scanning Electron Microscopy, P897
[7]   LINEAR FINITE-ELEMENT METHOD IN AXISYMMETRICAL MAGNETOSTATIC PROBLEMS [J].
LENCOVA, B ;
LENC, M .
IEEE TRANSACTIONS ON MAGNETICS, 1992, 28 (02) :1107-1110
[8]  
LENCOVA B, 1984, OPTIK, V68, P37
[9]   PROGRAM PACKAGE FOR THE COMPUTATION OF LENSES AND DEFLECTORS [J].
LENCOVA, B ;
WISSELINK, G .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1990, 298 (1-3) :56-66
[10]   UNCONVENTIONAL LENS COMPUTATION [J].
LENCOVA, B .
JOURNAL OF MICROSCOPY-OXFORD, 1995, 179 :185-190