Phase change recording using a scanning near-field optical microscope

被引:82
作者
Hosaka, S
Shintani, T
Miyamoto, M
Kikukawa, A
Hirotsune, A
Terao, M
Yoshida, M
Fujita, K
Kammer, S
机构
[1] HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO 185,JAPAN
[2] HITACHI INSTRUMENTS SERV CO LTD,SHIBUYA KU,TOKYO 151,JAPAN
[3] NISSEI SANGYO CO LTD,MINATO KU,TOKYO 105,JAPAN
[4] TOPOMETRIX INC,SANTA CLARA,CA 95054
关键词
D O I
10.1063/1.362363
中图分类号
O59 [应用物理学];
学科分类号
摘要
The formation and observation, with reflected light, of 60-nm-diam phase-changed domains in a thin GeSbTe film using a scanning near-field optical microscope with a 785 nm wavelength laser diode is demonstrated. The dependence of the domain size on incident laser power was obtained, and the size changed from 150 to 60 nm in diameter with incident power of 8.4-7.3 mW in the probe. At the threshold power of 7.3 mW, the film temperature rose to around 180 degrees C to partially phase change the local area of the film from amorphous to crystalline. A detected reflectivity increase due to phase change in the formed domain was 8%-2%. The observing (reading) was performed with an incident laser power of 0.2 mW, which corresponds to 10(-2)-10(-3) times less than in a magneto-optical recording. The incident laser power shows that the phase change reading using the reflection scanning near-field optical microscope has the potential to read the recorded bit at a speed over 10 MHz. (C) 1996 American Institute of Physics.
引用
收藏
页码:8082 / 8086
页数:5
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