Fabrication of nanoscale zero-mode waveguides using microlithography for single molecule sensing

被引：8
|
作者：
Teng, Chu-Hsiang [1 ]
Lionberger, Troy A. [2 ]
Zhang, Jin [1 ]
Meyhoefer, Edgar [2 ]
Ku, Pei-Cheng [1 ]
机构：
[1] Univ Michigan, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48105 USA
[2] Univ Michigan, Dept Mech Engn, Ann Arbor, MI 48105 USA
来源：
NANOTECHNOLOGY | 2012年 / 23卷 / 45期
基金：
美国国家科学基金会;
关键词：
FLUORESCENCE CORRELATION; SPECTROSCOPY;
D O I：
10.1088/0957-4484/23/45/455301
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
We present a novel approach to the fabrication of zero-mode waveguides (ZMWs) using inexpensive processing techniques. Our method is capable of rapid fabrication of circular nanoapertures with diameters ranging from 70 nm to 2 mu m, allowing us to perform a detailed characterization of the dependence of the fluorescence emission on the waveguide diameter. We also validated the use of the fabricated ZMWs by detecting single molecule binding events with a signal-to-noise ratio of ten.
引用
收藏
页数：6
相关论文
共 15 条
  • [1] Reversible Positioning of Single Molecules inside Zero-Mode Waveguides
    Larkin, Joseph
    Foquet, Mathieu
    Turner, Stephen W.
    Korlach, Jonas
    Wanunu, Meni
    NANO LETTERS, 2014, 14 (10) : 6023 - 6029
  • [2] Revealing the Binding Events of Single Proteins on Exosomes Using Nanocavity Antennas beyond Zero-Mode Waveguides
    Gao, Qingxue
    Zang, Peilin
    Li, Jinze
    Zhang, Wei
    Zhang, Zhiqi
    Li, Chao
    Yao, Jia
    Li, Chuanyu
    Yang, Qi
    Li, Shuli
    Guo, Zhen
    Zhou, Lianqun
    ACS APPLIED MATERIALS & INTERFACES, 2023, 15 (42) : 49511 - 49526
  • [3] Zero-Mode Waveguide Nanowells for Single-Molecule Detection in Living Cells
    Yang, Sora
    Klughammer, Nils
    Barth, Anders
    Tanenbaum, Marvin E.
    Dekker, Cees
    ACS NANO, 2023, 17 (20) : 20179 - 20193
  • [4] Extending Single-Molecule Forster Resonance Energy Transfer (FRET) Range beyond 10 Nanometers in Zero-Mode Waveguides
    Baibakov, Mikhail
    Patra, Satyajit
    Claude, Jean-Benoit
    Moreau, Antonin
    Lumeau, Julien
    Wenger, Jerome
    ACS NANO, 2019, 13 (07) : 8469 - 8480
  • [5] Long-Range Single-Molecule Forster Resonance Energy Transfer between Alexa Dyes in Zero-Mode Waveguides
    Baibakov, Mikhail
    Patra, Satyajit
    Claude, Jean-Benoit
    Wenger, Jerome
    ACS OMEGA, 2020, 5 (12): : 6947 - 6955
  • [6] Single-molecule spectroelectrochemical cross-correlation during redox cycling in recessed dual ring electrode zero-mode waveguides
    Han, Donghoon
    Crouch, Garrison M.
    Fu, Kaiyu
    Zaino, Lawrence P.
    Bohn, Paul W.
    CHEMICAL SCIENCE, 2017, 8 (08) : 5345 - 5355
  • [7] Single-Molecule Enzyme Dynamics of Monomeric Sarcosine Oxidase in a Gold-Based Zero-Mode Waveguide
    Zhao, Jing
    Branagan, Sean P.
    Bohn, Paul W.
    APPLIED SPECTROSCOPY, 2012, 66 (02) : 163 - 169
  • [8] Sensing force and charge at the nanoscale with a single-molecule tether
    Meng, Xuanhui
    Kukura, Philipp
    Faez, Sanli
    NANOSCALE, 2021, 13 (29) : 12687 - 12696
  • [9] Improving zero-mode waveguide structure for enhancing signal-to-noise ratio of real-time single-molecule fluorescence imaging: A computational study
    Tanii, Takashi
    Akahori, Rena
    Higano, Shun
    Okubo, Kotaro
    Yamamoto, Hideaki
    Ueno, Taro
    Funatsu, Takashi
    PHYSICAL REVIEW E, 2013, 88 (01):
  • [10] Quantitative Advantages of Corrosion Sensing Using Fluorescence, Microscopy, and Single-Molecule Detection
    Siegel, Mark
    Liu, Lianlian
    Pfaffenberger, Zechariah
    Kisley, Lydia
    ACS APPLIED MATERIALS & INTERFACES, 2024, 16 (42) : 56481 - 56496
12