Advances in Electrochemical Micromachining of Silicon: Towards MEMS Fabrication

被引：9

作者：

Bassu, Margherita ^{[1
]}

Strambini, Lucanos M. ^{[1
]}

Barillaro, Giuseppe ^{[1
]}

机构：

[1] Univ Pisa, Dipartimento Ingn Informaz Elettron Informat Tele, I-56122 Pisa, Italy

来源：

EUROSENSORS XXV | 2011年 / 25卷

关键词：

MEMS; silicon micromachining; electrochemical etching;

D O I：

10.1016/j.proeng.2011.12.409

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In this work, a significant step towards the fabrication of very high aspect-ratio complex microsystems by silicon electrochemical micromachining in HF-based electrolytes (ECM) is given. High aspect-ratio MEMS structures, with different shape and dimensions, consisting of inertial free-standing masses equipped with comb-fingers and suspended by springs from the substrate were fabricated by exploiting advanced features of the ECM technology. (C) 2011 Published by Elsevier Ltd.

引用

页数：4

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