Functional materials integrated on III-V semiconductors

被引:9
作者
Gatabi, Javad [1 ]
Lyon, Kevin [1 ]
Rahman, Shafiqur [1 ]
Caro, Manuel [1 ]
Rojas-Ramirez, Juan [1 ]
Cott-Garcia, Joelson [2 ]
Droopad, Ravi [1 ]
Lee, Byounghak [2 ]
机构
[1] Texas State Univ, Ingram Sch Engn, San Marcos, TX 78666 USA
[2] Texas State Univ, Dept Phys, San Marcos, TX 78666 USA
关键词
Ferroelectric oxides; Molecular beam epitaxy; Barium titanate; Lead zirconium titanate; Density Functional Theory; Solution spin coating; PZT THIN-FILMS; NEGATIVE CAPACITANCE; OXIDES; SILICON;
D O I
10.1016/j.mee.2015.04.050
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The integration of ferroelectric oxides on semiconductors has been achieved through the use of molecular beam epitaxy and solution spin coating. The oxide layers were determined to be single phase and crystalline and were oriented with the (100) along the growth direction. Epitaxial SrTiO3 and BaTiO3 buffer layers were grown on GaAs and Si using a unique MBE process for nucleation that suppressed the formation of interfacial oxide. The deposition of ferroelectric Pb(Zr)TiO3, on STO buffered Si and GaAs was carried out using solution spin coating. The nucleation of the oxide growth by solution spin coating was promoted by the crystallinity of the surface structure of the SrTiO3 buffer layer. Ab initio Density Functional Theory calculations were used to determine the interfacial structure and band alignments for the STO/GaAs and BTO/GaAs interfaces. Initial electrical characterization of the PZT grown on GaAs was determined by measuring the polarization versus electric field which suggests evidence of ferroelectricity. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码:117 / 121
页数:5
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