A piezo-mechanical characterization of PZT thick films screen-printed on alumina substrate

被引：61
作者：
Walter, V
Delobelle, P
Le Moal, P
Joseph, E
Collet, M
机构：
[1] Univ Franche Comte, Lab Mecan Appl, UMR 6604, CNRS, F-25000 Besancon, France
[2] Univ Franche Comte, IMFC FR0067, F-25000 Besancon, France
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2002年 / 96卷 / 2-3期
关键词：
PZT; thick films; screen-printing; mechanical characterization; electromechanical modeling;
D O I：
10.1016/S0924-4247(01)00767-1
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Thick soft and hard lead zirconate titanate (PZT) films are fabricated on alumina substrates using the screen-printing technique. The geometries of the substrates are suited to three different mechanical characterization tests devoted to the determination of the Young's modulus of the films: a dynamic, a quasi-static and a nanoindentation test. Values of 52 +/- 8 and 20 +/- 7 GPa for the Young's modulus are, respectively calculated for the soft- and hard-PZT. These values are strongly influenced by porosity in the films. The piezoelectric coefficient d(31) is also investigated. It is found to be near -120 +/- 5 pC/N for the soft-PZT and it is close to -25 +/- 3 pC/N for the hard-PZT Motivated by experimental observations, a non-linear piezo-mechanical model predicting the electromechanical behavior of a cantilever bimorph is developed. (C) 2002 Elsevier Science B.V. All rights reserved.
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收藏
页码：157 / 166
页数：10
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