State of the Art of Silicon Nitride Photonics Integration Platforms

被引：0

作者：

Munoz, Pascual ^{[1
,2
]}

Domenech, Jose David ^{[2
]}

Dominguez, Carlos ^{[3
]}

Sanchez, Ana ^{[3
]}

Mico, Gloria ^{[1
]}

Bru, Luis A. ^{[1
]}

Perez, Daniel ^{[1
]}

Pastor, Daniel ^{[1
]}

机构：

[1] Univ Politecn Valencia, C Camino de Vera S-N, Valencia 46021, Spain

[2] VLC Photon SL, C Camino de Vera S-N, Valencia 46021, Spain

[3] CSIC, Inst Microelect Barcelona CNM, Barcelona 08193, Spain

来源：

2017 19TH INTERNATIONAL CONFERENCE ON TRANSPARENT OPTICAL NETWORKS (ICTON) | 2017年

基金：

欧盟地平线“2020”;

关键词：

WAVE-GUIDES; HIGH-CONFINEMENT; PERFORMANCE;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, a review of the current state of the art of Silicon Nitride photonics integration platforms is presented. These platforms are nowadays employed primarily for bio-photonics and telecom applications, ranging from the visible to the long near infrared. Prospects for the extension to mid-infrared wavelengths and applications are also presented and discussed.

引用

页数：4

共 31 条

[1]

[Anonymous], SILICON BASED LONGWA

[2]

[Anonymous], OPT C OPTOEL SAL SPA

[3]

[Anonymous], EUR C INT OPT MAY

[4]

[Anonymous], APPL PHYS LETT

[5]

[Anonymous], SI SILICON SILICON N

[6]

Baets R, 2016, 2016 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC)

[7] Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding [J].

Bauters, Jared F. ;

Heck, Martijn J. R. ;

John, Demis D. ;

Barton, Jonathon S. ;

Bruinink, Christiaan M. ;

Leinse, Arne ;

Heideman, Rene G. ;

Blumenthal, Daniel J. ;

Bowers, John E. .

OPTICS EXPRESS, 2011, 19 (24) :24090-24101

[8] Ultra-low-loss high-aspect-ratio Si3N4 waveguides [J].

Bauters, Jared F. ;

Heck, Martijn J. R. ;

John, Demis ;

Dai, Daoxin ;

Tien, Ming-Chun ;

Barton, Jonathon S. ;

Leinse, Arne ;

Heideman, Rene G. ;

Blumenthal, Daniel J. ;

Bowers, John E. .

OPTICS EXPRESS, 2011, 19 (04) :3163-3174

[9] High-contrast, all-silicon waveguiding platform for ultra-broadband mid-infrared photonics [J].

Chiles, Jeff ;

Khan, Saeed ;

Ma, Jichi ;

Fathpour, Sasan .

APPLIED PHYSICS LETTERS, 2013, 103 (15)

[10] High confinement, high yield Si3N4 waveguides for nonlinear optical applications [J].

Epping, Joern P. ;

Hoekman, Marcel ;

Mateman, Richard ;

Leinse, Arne ;

Heideman, Rene G. ;

van Rees, Albert ;

van der Slot, Peter J. M. ;

Lee, Chris J. ;

Boller, Klaus-J. .

OPTICS EXPRESS, 2015, 23 (02) :642-648

← 1 2 3 4 →