The influence of working gas on CVD diamond quality

被引：21

作者：

Fabisiak, K. ^{[1
]}

Torz-Piotrowska, R. ^{[2
]}

Staryga, E. ^{[3
]}

Szybowicz, M. ^{[4
]}

Paprocki, K. ^{[1
]}

Banaszak, A. ^{[1
]}

Popielarski, P. ^{[1
]}

机构：

[1] Kazimierz Wielki Univ, Inst Phys, PL-85090 Bydgoszcz, Poland

[2] Univ Technol & Life Sci, Fac Chem Technol & Engn, PL-85326 Bydgoszcz, Poland

[3] Tech Univ Lodz, Inst Phys, PL-90924 Lodz, Poland

[4] Poznan Univ Tech, Fac Tech Phys, Poznan, Poland

来源：

MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS | 2012年 / 177卷 / 15期

关键词：

Diamond layers; HF CVD method; XRD; Raman spectroscopy; CARBON; FILMS; HYDROGEN; DEPOSITION; GROWTH;

D O I：

10.1016/j.mseb.2011.12.013

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The effect of the working gas pressure and its composition on diamond quality and particles size was investigated. The diamond layers were grown in Hot Filament Chemical Vapor Deposition (HF CVD) reactor. A methanol-hydrogen gas mixture was used as the precursor gas. The structure of these films was characterized by scanning electron microscopy (SEM) and micro-Raman spectroscopy. Typically, the diamond's crystallite size decreased with increasing pressure and increasing with methanol concentration. Additionally the admixture of non-diamond (sp(2)-hybridized carbon) phase also increased with increasing both of deposition pressure and of methanol concentration. It was observed that the deposition pressure has a weaker influence on diamond quality than the methanol concentration. (C) 2011 Elsevier DV. All rights reserved.

引用

页码：1352 / 1357

页数：6

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