The influence of working gas on CVD diamond quality

被引：21

作者：

Fabisiak, K. ^{[1
]}

Torz-Piotrowska, R. ^{[2
]}

Staryga, E. ^{[3
]}

Szybowicz, M. ^{[4
]}

Paprocki, K. ^{[1
]}

Banaszak, A. ^{[1
]}

Popielarski, P. ^{[1
]}

机构：

[1] Kazimierz Wielki Univ, Inst Phys, PL-85090 Bydgoszcz, Poland

[2] Univ Technol & Life Sci, Fac Chem Technol & Engn, PL-85326 Bydgoszcz, Poland

[3] Tech Univ Lodz, Inst Phys, PL-90924 Lodz, Poland

[4] Poznan Univ Tech, Fac Tech Phys, Poznan, Poland

来源：

MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS | 2012年 / 177卷 / 15期

关键词：

Diamond layers; HF CVD method; XRD; Raman spectroscopy; CARBON; FILMS; HYDROGEN; DEPOSITION; GROWTH;

D O I：

10.1016/j.mseb.2011.12.013

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The effect of the working gas pressure and its composition on diamond quality and particles size was investigated. The diamond layers were grown in Hot Filament Chemical Vapor Deposition (HF CVD) reactor. A methanol-hydrogen gas mixture was used as the precursor gas. The structure of these films was characterized by scanning electron microscopy (SEM) and micro-Raman spectroscopy. Typically, the diamond's crystallite size decreased with increasing pressure and increasing with methanol concentration. Additionally the admixture of non-diamond (sp(2)-hybridized carbon) phase also increased with increasing both of deposition pressure and of methanol concentration. It was observed that the deposition pressure has a weaker influence on diamond quality than the methanol concentration. (C) 2011 Elsevier DV. All rights reserved.

引用

页码：1352 / 1357

页数：6

共 26 条

[1] Diamond diodes and transistors [J].

Aleksov, A ;

Denisenko, A ;

Kunze, M ;

Vescan, A ;

Bergmaier, A ;

Dollinger, G ;

Ebert, W ;

Kohn, E .

SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2003, 18 (03) :S59-S66

[2]

Anthony R.T, 1991, NATO ADV STUDY I DIA

[3] Sp3/sp2 character of the carbon and hydrogen configuration in micro- and nanocrystalline diamond [J].

Ballutaud, D. ;

Jomard, F. ;

Kociniewski, T. ;

Rzepka, E. ;

Girard, H. ;

Saada, S. .

[4] Paramagnetic defects in diamond films synthesized by the hot filament chemical vapour deposition [J].

Banaszak, A. ;

Fabisiak, K. ;

Kaczmarski, M. ;

Kozanecki, M. .

CRYSTAL RESEARCH AND TECHNOLOGY, 2006, 41 (06) :535-540

[5] General equation for the determination of the crystallite size La of nanographite by Raman spectroscopy [J].

Cançado, LG ;

Takai, K ;

Enoki, T ;

Endo, M ;

Kim, YA ;

Mizusaki, H ;

Jorio, A ;

Coelho, LN ;

Magalhaes-Paniago, R ;

Pimenta, MA .

APPLIED PHYSICS LETTERS, 2006, 88 (16)

[6]

Cui B, 1998, PHYS REV LETT, V81

[7] Electrochemical and surface structural characterization of hydrogen plasma treated glassy carbon electrodes [J].

DeClements, R ;

Swain, GM ;

Dallas, T ;

Holtz, MW ;

Herrick, RD ;

Stickney, JL .

LANGMUIR, 1996, 12 (26) :6578-6586

[8]

Ferrari C, 2001, PHYS REV B, V63

[9] Diamond growth by chemical vapour deposition [J].

Gracio, J. J. ;

Fan, Q. H. ;

Madaleno, J. C. .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2010, 43 (37)

[10] Investigation of the effect of hydrogen on electrical and optical properties in chemical vapor deposited on homoepitaxial diamond films [J].

Hayashi, K ;

Yamanaka, S ;

Watanabe, H ;

Sekiguchi, T ;

Okushi, H ;

Kajimura, K .

JOURNAL OF APPLIED PHYSICS, 1997, 81 (02) :744-753

← 1 2 3 →