Phonon structure of InN grown by atomic layer epitaxy

被引:114
|
作者
Inushima, T
Shiraishi, T
Davydov, VY
机构
[1] Tokai Univ, Dept Commun Engn, Hiratsuka, Kanagawa 2591292, Japan
[2] Russian Acad Sci, AF Ioffe Physicotech Inst, St Petersburg 194021, Russia
关键词
semiconductors; epitaxy; phonons; inelastic light scattering;
D O I
10.1016/S0038-1098(99)00108-8
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
InN single crystal was grown by W-assisted atomic layer epitaxy under atmospheric pressure. The c-axis was perpendicular to the c-plane of sapphire substrate. The obtained InN was a degenerate n-type semiconductor with the carrier concentration of similar to 3 x 10(20)/cm(3). The phonon structure was investigated by the use of infrared and Raman spectra, and six optical phonons were observed; A(1)(TO) at 480 cm(-1), A(1)(LO) at 580 cm(-1), E-1(TO) at 476 cm(-1), E-1(LO) at 570 cm(-1), E-2(low) at 87 and E-2(high) at 488 cm(-1). Moreover two silent B-1 modes were observed at 200 and 540 cm(-1). From the plasma reflection spectra, dielectric constants of epsilon(0) = 8.1, epsilon(infinity) = 5.8 and effective electron mass of m(e perpendicular to)* = 0.24m(0) were obtained. (C) 1999 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:491 / 495
页数:5
相关论文
共 50 条
  • [41] Atomic structure, electronic states, and optical properties of epitaxially grown β-Ga2O3 layers
    Zatsepin, D. A.
    Boukhvalov, D. W.
    Zatsepin, A. F.
    Kuznetsova, Yu A.
    Gogova, D.
    Shur, V. Ya
    Esin, A. A.
    SUPERLATTICES AND MICROSTRUCTURES, 2018, 120 : 90 - 100
  • [42] Mechanisms of magnesium incorporation into GaN layers grown by molecular beam epitaxy
    Cheng, TS
    Novikov, SV
    Foxon, CT
    Orton, JW
    SOLID STATE COMMUNICATIONS, 1999, 109 (07) : 439 - 443
  • [43] The crystallographic structure of thin Mn-rich ZnMnTe layers grown by molecular beam epitaxy
    Dynowska, E
    Przezdziecka, E
    JOURNAL OF ALLOYS AND COMPOUNDS, 2005, 401 (1-2) : 265 - 271
  • [44] Progress in theoretical approach to InGaN and InN epitaxy: In incorporation efficiency and structural stability
    Kangawa, Yoshihiro
    Ito, Tomonori
    Koukitu, Akinori
    Kakimoto, Koichi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2014, 53 (10)
  • [45] Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition
    Shih, Huan-Yu
    Lin, Ming-Chih
    Chen, Liang-Yih
    Chen, Miin-Jang
    NANOTECHNOLOGY, 2015, 26 (01)
  • [46] Atomic-Resolution Mapping of Localized Phonon Modes at Grain Boundaries
    Haas, Benedikt
    Boland, Tara M.
    Elsaesser, Christian
    Singh, Arunima K.
    March, Katia
    Barthel, Juri
    Koch, Christoph T.
    Rez, Peter
    NANO LETTERS, 2023, 23 (13) : 5975 - 5980
  • [47] Chemical resistance of thin film materials based on metal oxides grown by atomic layer deposition
    Sammelselg, Vaeino
    Netsipailo, Ivan
    Aidla, Aleks
    Tarre, Aivar
    Aarik, Lauri
    Asari, Jelena
    Ritslaid, Peeter
    Aarik, Jaan
    THIN SOLID FILMS, 2013, 542 : 219 - 224
  • [48] Comparison of dimethylzinc and diethylzinc as precursors for monocrystalline zinc oxide grown by atomic layer deposition method
    Wachnicki, L.
    Lukasiewicz, M.
    Witkowski, B.
    Krajewski, T.
    Luka, G.
    Kopalko, K.
    Minikayev, R.
    Przezdziecka, E.
    Domagala, J. Z.
    Godlewski, M.
    Guziewicz, E.
    PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2010, 247 (07): : 1699 - 1701
  • [49] Using hole screening effect on hole-phonon interaction to estimate hole density in Mg-doped InN
    Su, Yi-En
    Wen, Yu-Chieh
    Hong, Yu-Liang
    Lee, Hong-Mao
    Gwo, Shangjr
    Lin, Yuan-Ting
    Tu, Li-Wei
    Liu, Hsiang-Lin
    Sun, Chi-Kuang
    APPLIED PHYSICS LETTERS, 2011, 98 (25)
  • [50] Photoluminescence of erbium-oxygen-doped silicon grown by molecular beam epitaxy
    Stimmer, J
    Wetterer, C
    Abstreiter, G
    SOLID STATE COMMUNICATIONS, 1996, 100 (05) : 321 - 323