Phonon structure of InN grown by atomic layer epitaxy

被引:114
|
作者
Inushima, T
Shiraishi, T
Davydov, VY
机构
[1] Tokai Univ, Dept Commun Engn, Hiratsuka, Kanagawa 2591292, Japan
[2] Russian Acad Sci, AF Ioffe Physicotech Inst, St Petersburg 194021, Russia
关键词
semiconductors; epitaxy; phonons; inelastic light scattering;
D O I
10.1016/S0038-1098(99)00108-8
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
InN single crystal was grown by W-assisted atomic layer epitaxy under atmospheric pressure. The c-axis was perpendicular to the c-plane of sapphire substrate. The obtained InN was a degenerate n-type semiconductor with the carrier concentration of similar to 3 x 10(20)/cm(3). The phonon structure was investigated by the use of infrared and Raman spectra, and six optical phonons were observed; A(1)(TO) at 480 cm(-1), A(1)(LO) at 580 cm(-1), E-1(TO) at 476 cm(-1), E-1(LO) at 570 cm(-1), E-2(low) at 87 and E-2(high) at 488 cm(-1). Moreover two silent B-1 modes were observed at 200 and 540 cm(-1). From the plasma reflection spectra, dielectric constants of epsilon(0) = 8.1, epsilon(infinity) = 5.8 and effective electron mass of m(e perpendicular to)* = 0.24m(0) were obtained. (C) 1999 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:491 / 495
页数:5
相关论文
共 50 条
  • [31] Contactless electroreflectance of ZnO layers grown by atomic layer deposition at low temperature
    Kudrawiec, R.
    Misiewicz, J.
    Wachnicki, L.
    Guziewicz, E.
    Godlewski, M.
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2011, 26 (07)
  • [32] Nanometer-thick copper films grown by thermal atomic layer deposition
    Zhong, Zhenyu
    Wang, Xiuqin
    Ding, Jianning
    Yuan, Ningyi
    THIN SOLID FILMS, 2015, 589 : 673 - 680
  • [33] Epitaxy Single Crystal GaN on AlN Prepared by Plasma-enhanced Atomic Layer Deposition
    Lu Hao
    Xu Shengrui
    Huang Yong
    Chen Xing
    Xu Shuang
    Liu Xu
    Wang Xinhao
    Gao Yuan
    Zhang Yachao
    Duan Xiaoling
    Zhang Jincheng
    Hao Yue
    JOURNAL OF INORGANIC MATERIALS, 2024, 39 (05) : 547 - 553
  • [34] On the Fermi-level pinning of InN grown surfaces
    Binh Huy Le
    Zhao, Songrui
    Nhung Hong Tran
    Szkopek, Thomas
    Mi, Zetian
    APPLIED PHYSICS EXPRESS, 2015, 8 (06)
  • [35] Carrier localization in InN epilayers grown on Si substrates
    G. W. Shu
    M. H. Lo
    M. D. Yang
    C. L. Hsu
    J. L. Shen
    S. M. Lan
    SOLID STATE COMMUNICATIONS, 2007, 141 (03) : 109 - 112
  • [36] Optical properties of InN grown on Si(111) substrate
    Sakalauskas, E.
    Schley, P.
    Raethel, J.
    Klar, T. A.
    Mueller, R.
    Pezoldt, J.
    Tonisch, K.
    Grandal, J.
    Sanchez-Garcia, M. A.
    Calleja, E.
    Vilalta-Clemente, A.
    Ruterana, P.
    Goldhahn, R.
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2010, 207 (05): : 1066 - 1069
  • [37] Crystallinity, Surface Morphology, and Photoelectrochemical Effects in Conical InP and InN Nanowires Grown on Silicon
    Parameshwaran, Vijay
    Xu, Xiaoqing
    Clemens, Bruce
    ACS APPLIED MATERIALS & INTERFACES, 2016, 8 (33) : 21454 - 21464
  • [38] Growth and optical characteristics of Tm-doped AlGaN layer grown by organometallic vapor phase epitaxy
    Takatsu, J.
    Fuji, R.
    Tatebayashi, J.
    Timmerman, D.
    Lesage, A.
    Gregorkiewicz, T.
    Fujiwara, Y.
    JOURNAL OF APPLIED PHYSICS, 2018, 123 (16)
  • [39] Role of V/III ratio on atomic ordering and surface morphology of InGaP layers grown by chemical beam epitaxy
    Bettini, J
    de Carvalho, MMG
    Cotta, MA
    Ugarte, D
    SURFACE SCIENCE, 2003, 540 (01) : 129 - 135
  • [40] Tin Monosulfide Thin Films Grown by Atomic Layer Deposition Using Tin 2,4-Pentanedionate and Hydrogen Sulfide
    Kim, Jay Yu
    George, Steven M.
    HIGH AND LOW CONCENTRATOR SYSTEMS FOR SOLAR ELECTRIC APPLICATIONS V, 2010, 7769