Conductive Atomic Force Microscope Study of Bipolar and Threshold Resistive Switching in 2D Hexagonal Boron Nitride Films

被引:66
作者
Ranjan, A. [1 ,2 ]
Raghavan, N. [1 ]
O'Shea, S. J. [2 ]
Mei, S. [1 ,2 ]
Bosman, M. [2 ]
Shubhakar, K. [1 ]
Pey, K. L. [1 ]
机构
[1] Singapore Univ Technol & Design, Engn Prod Dev, 8 Somapah Rd, Singapore 487372, Singapore
[2] Agcy Sci Technol & Res, Inst Mat Res & Engn, 2 Fusionopolis Way, Singapore 138634, Singapore
关键词
DIELECTRIC-BREAKDOWN; GRAPHENE; MEMORY;
D O I
10.1038/s41598-018-21138-x
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
This study investigates the resistive switching characteristics and underlying mechanism in 2D layered hexagonal boron nitride (h-BN) dielectric films using conductive atomic force microscopy. A combination of bipolar and threshold resistive switching is observed consistently on multi-layer h-BN/Cu stacks in the low power regime with current compliance (I-comp) of less than 100 nA. Standard random telegraph noise signatures were observed in the low resistance state (LRS), similar to the trends in oxygen vacancy-based RRAM devices. While h-BN appears to be a good candidate in terms of switching performance and endurance, it performs poorly in terms of retention lifetime due to the self-recovery of LRS state (similar to recovery of soft breakdown in oxide-based dielectrics) that is consistently observed at all locations without requiring any change in the voltage polarity for I-comp similar to 1-100 nA.
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页数:9
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