A study of structure and properties of Ti-doped DLC film by reactive magnetron sputtering with ion implantation

被引：86

作者：

Ma, Guojia ^{[1
,2
]}

Gong, Shuili ^{[2
]}

Lin, Guoqiang ^{[1
]}

Zhang, Lin ^{[1
]}

Sun, Gang ^{[2
]}

机构：

[1] Dalian Univ Technol, Dept Phys & Optoelect Technol, Dalian 116024, Peoples R China

[2] Beijing Aeronaut Mfg Technol Res Inst, Natl Key Lab Sci & Technol Power Beam Proc, Beijing 100024, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2012年 / 258卷 / 07期

关键词：

Ti doping; DLC; Ion implantation; Adhesion; Hydrophobic property; TRIBOLOGICAL PROPERTIES; CARBON-FILMS; COATINGS;

D O I：

10.1016/j.apsusc.2011.11.034

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Ti-doped diamond- like carbon (DLC) films were prepared on Ti alloys by reactive magnetron sputtering combined with PSII technology. The structure and properties of unmodified and Ti-doped DLC films were analyzed in a systematic way by different testing, such as TEM, XPS, frictional wear testing, contact angle measurement and so on. The results showed that Ti-doped DLC was a typical a-C:H film containing TiC nanometer grains, whose mechanical properties were obviously improved, such as hardness, wear resistance and cohesive strength, still kept good wear resistance at the ambient temperature of 450 degrees C, and held a rather large mean water contact angle of 104.2 +/- 1 degrees. (C) 2011 Elsevier B. V. All rights reserved.

引用

页码：3045 / 3050

页数：6

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