Advances in High Resolution Helium Ion Microscope (HIM) Imaging

被引：0
|
作者：
Sanford, Colin [1 ]
Notte, John [1 ]
Scipioni, Larry [1 ]
McVey, Shawn [1 ]
Hill, Ray [1 ]
Sijbrandij, Sybren [1 ]
Farkas, Lou [1 ]
机构：
[1] Carl Zeiss SMT Inc, Peabody, MA 01960 USA
来源：
MICROSCOPY AND MICROANALYSIS | 2009年 / 15卷
关键词：
D O I：
10.1017/S1431927609094331
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：654 / 655
页数：2
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