Plastic deformation behavior of nanostructured CrN/AlN multilayer coatings deposited by hybrid dcMS/HPPMS

被引:37
作者
Bobzin, K. [1 ]
Broegelmann, T. [1 ]
Kruppe, N. C. [1 ]
Arghavani, M. [1 ]
Mayer, J. [2 ]
Weirich, T. E. [2 ]
机构
[1] Rhein Westfal TH Aachen, Surface Engn Inst, Kackertstr 15, D-52072 Aachen, Germany
[2] Rhein Westfal TH Aachen, Cent Facil Electron Microscopy, Ahornstr 55, D-52074 Aachen, Germany
关键词
HPPMS; HiPIMS; Nanoscratch; TEM; Deformation mechanism; PVD; ENVIRONMENTAL BARRIER COATINGS; AL-N FILMS; OXIDATION BEHAVIOR; MECHANICAL-BEHAVIOR; HARD COATINGS; THIN-FILMS; POWER; CRN; CRALN; TIN;
D O I
10.1016/j.surfcoat.2017.06.092
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Physical vapor deposition (PVD) is a commonly applied technology for deposition of hard coating systems such as chromium (Cr)-based nitride coatings on tools and components used in tribological applications. In such applications, the tools and components are subjected to complex loading situations, which can lead to elastic plastic deformation of coating/substrate compounds or hard fracture response followed by crack formation. One approach to increase the durability of such load-bearing compounds is the deposition of nanostructured coatings such as CrN/AIN nanolaminates, which exhibit promising properties in terms of hardness and crack resistance. The understanding of the deformation behavior of such multilayers is, however, a key factor for further coating developments. Implementation of nanoscratch analyses in conjunction with high resolution microscopy techniques is an approach to study the tribological behavior of nanostructured coatings and to gain information about their plastic deformation mechanisms under normal and lateral loads. Nanoscratch analyses of the nanolaminate coating system CrN/AlN deposited on quenched and tempered AISI 420 steel substrate and investigation of the resulting plastic deformation are the subjects of current research. In the present work, a hybrid technology, consisting of direct current and high power pulse magnetron sputtering (dcMS/HPPMS), was used for the coating deposition. The CrN/AlN nanolaminate was deposited with a bilayer period (thickness CrN + MN) of A = 13 nm. In order to study the plastic deformation of the coating, nanoscratch analyses were performed applying a Berkovich tip. The deformation of coating system under nanoscratch loads was quantitatively analyzed by means of depth profiling using confocal laser scanning microscopy (CLSM). Furthermore, a comprehensive study of the plastic deformation and crack resistance was performed using scanning electron microscopy (SEM). The SEM analyses were carried out on the surface and cross section fractures of the nano scratch tracks. Scanning transmission electron microscopy (STEM) was applied to explore the micro-scale cracking phenomena underneath the nanoscratch tracks. High resolution transmission electron microscopy (HRTEM) was furthermore applied to explore the mechanism of plastic deformation of the investigated coatings. Based on the results, the CrN/AIN nanolaminate exhibits a significant resistance against plastic deformation and crack formation. Furthermore, the plastic deformation of the investigated coating is explained by grain rotation and grain boundary sliding.
引用
收藏
页码:253 / 261
页数:9
相关论文
共 65 条
  • [41] A study of the oxidation behavior of CrN and CrAlN thin films in air using DSC and TGA analyses
    Lin, J.
    Mishra, B.
    Moore, J. J.
    Sproul, W. D.
    [J]. SURFACE & COATINGS TECHNOLOGY, 2008, 202 (14) : 3272 - 3283
  • [42] Microstructure, mechanical and tribological properties of Cr1-xAlxN films deposited by pulsed-closed field unbalanced magnetron sputtering (P-CFUBMS)
    Lin, J.
    Mishra, B.
    Moore, J. J.
    Sproul, W. D.
    [J]. SURFACE & COATINGS TECHNOLOGY, 2006, 201 (07) : 4329 - 4334
  • [43] High rate deposition of thick CrN and Cr2N coatings using modulated pulse power (MPP) magnetron sputtering
    Lin, Jianliang
    Sproul, William D.
    Moore, John J.
    Lee, Sabrina
    Myers, Sterling
    [J]. SURFACE & COATINGS TECHNOLOGY, 2011, 205 (10) : 3226 - 3234
  • [44] The structure and properties of chromium nitride coatings deposited using dc, pulsed dc and modulated pulse power magnetron sputtering
    Lin, Jianliang
    Moore, John J.
    Sproul, William D.
    Mishra, Brajendra
    Wu, Zhili
    Wang, Jun
    [J]. SURFACE & COATINGS TECHNOLOGY, 2010, 204 (14) : 2230 - 2239
  • [45] Numerical comparison between Berkovich and conical nano-indentations: Mechanical behaviour and micro-texture evolution
    Liu, Mao
    Lu, Cheng
    Tieu, Kiet
    Yu, Hailiang
    [J]. MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2014, 619 : 57 - 65
  • [46] An introduction to thin film processing using high-power impulse magnetron sputtering
    Lundin, Daniel
    Sarakinos, Kostas
    [J]. JOURNAL OF MATERIALS RESEARCH, 2012, 27 (05) : 780 - 792
  • [47] Influence of substrate bias voltage on structure and properties of the CrAlN films deposited by unbalanced magnetron sputtering
    Lv, Yanhong
    Ji, Li
    Liu, Xiaohong
    Li, Hongxuan
    Zhou, Huidi
    Chen, Jianmin
    [J]. APPLIED SURFACE SCIENCE, 2012, 258 (08) : 3864 - 3870
  • [48] Synthesis of pseudobinary Cr-Al-N films with B1 structure by rf-assisted magnetron sputtering method
    Makino, Y
    Nogi, K
    [J]. SURFACE & COATINGS TECHNOLOGY, 1998, 98 (1-3) : 1008 - 1012
  • [49] Experimental assessment of the elastic properties of thin TiN/AlN superlattice and nano-multilayer coatings
    Oila, A.
    Bull, S. J.
    [J]. SURFACE & COATINGS TECHNOLOGY, 2014, 257 : 87 - 94
  • [50] AN IMPROVED TECHNIQUE FOR DETERMINING HARDNESS AND ELASTIC-MODULUS USING LOAD AND DISPLACEMENT SENSING INDENTATION EXPERIMENTS
    OLIVER, WC
    PHARR, GM
    [J]. JOURNAL OF MATERIALS RESEARCH, 1992, 7 (06) : 1564 - 1583