Laser application to IC correction.

The physical problems in application of laser technologies for correction of Integrated Circuits (IC) and way of their solution are presented. The presence of an electronic component defining area of a degradation of the materials surrounding laser cavity, considerably limits application of femto-second laser and of ion beams for operation with semiconductor materials. On the basis of experimental data is shown, that there are reason for correction of basic formulas, which uses for calculation the laser-material interaction.