Thermally induced evolution of hydrogenated amorphous carbon

被引：66

作者：

Mangolini, Filippo ^{[1
]}

Rose, Franck ^{[2
]}

Hilbert, James ^{[3
]}

Carpick, Robert W. ^{[3
]}

机构：

[1] Univ Penn, Dept Mat Sci & Engn, Philadelphia, PA 19104 USA

[2] HGST, San Jose, CA 95135 USA

[3] Univ Penn, Dept Mech Engn & Appl Mech, Philadelphia, PA 19104 USA

来源：

APPLIED PHYSICS LETTERS | 2013年 / 103卷 / 16期

基金：

美国国家科学基金会;

关键词：

DIAMOND-LIKE-CARBON; RAY PHOTOELECTRON-SPECTROSCOPY; EXCITED AUGER-ELECTRON; A-C-H; GLASSY-CARBON; VALENCE BANDS; XPS; FILMS; GRAPHITE; SPECTRA;

D O I：

10.1063/1.4826100

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The thermally induced structural evolution of hydrogenated amorphous carbon (a-C:H) films was investigated in situ by X-ray photoelectron spectroscopy for annealing temperatures up to 500 degrees C. A model for the conversion of sp(3)- to sp(2)-hybridized carbon in a-C:H vs. temperature and time was developed and applied to determine the ranges of activation energies for the thermally activated processes occurring. The energies are consistent with ordering and clustering of sp(2) carbon, scission of sp(3) carbon-hydrogen bonds and formation of sp(2) carbon, and direct transformation of sp(3)- to sp(2)-hybridized carbon. (C) 2013AIP Publishing LLC.

引用

页数：5

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