Highly sensitive humidity sensor based on quartz crystal microbalance coated with ZnO colloid spheres

被引：86

作者：

Xie, Juan ^{[1
,2
]}

Wang, Hu ^{[1
]}

Lin, Yuanhua ^{[2
]}

Zhou, Ying ^{[2
]}

Wu, Yuanpeng ^{[2
]}

机构：

[1] Southwest Petr Univ, State Key Lab Oil & Gas Reservoir Geol & Exploita, Chengdu 610500, Peoples R China

[2] Southwest Petr Univ, Coll Mat Sci & Engn, Chengdu 610500, Peoples R China

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2013年 / 177卷

关键词：

Quartz crystal microbalance (QCM); ZnO colloid sphere; Humidity sensitivity; Adsorption; Desorption; FIELD-EFFECT TRANSISTORS; COMPOSITE-MATERIAL; ADSORPTION-KINETICS; SENSING PROPERTIES; QCM TECHNIQUE; THIN-FILMS; RESONATOR; SALTS;

D O I：

10.1016/j.snb.2012.12.033

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Different sizes of ZnO colloid spheres were coated on quartz crystal microbalance (QCM) by the self-assembly method. The device exhibits excellent humidity sensing properties in the whole humidity range from 11% to 95%, such as high sensitivity, good linearity, and fast response/recovery time. The results showed that the humidity sensitivity of these sensors increased with increasing relative humidity (RH). Furthermore, the humidity sensitivity enhanced with increasing size of ZnO colloid spheres. We also discussed the adsorption and desorption of water molecules on different sizes of ZnO colloid spheres in different humidity. Crown Copyright (c) 2012 Published by Elsevier B.V. All rights reserved.

引用

页码：1083 / 1088

页数：6

共 38 条

[1] The application of CNT/Nafion composite material to low humidity sensing measurement [J].

Chen, HW ;

Wu, RJ ;

Chan, KH ;

Sun, YL ;

Su, PG .

SENSORS AND ACTUATORS B-CHEMICAL, 2005, 104 (01) :80-84

[2] Humidity-sensing properties of a ZnO nanowire film as measured with a QCM [J].

Erol, A. ;

Okur, S. ;

Yagmurcukardes, N. ;

Arikan, M. C. .

SENSORS AND ACTUATORS B-CHEMICAL, 2011, 152 (01) :115-120

[3] Humidity sensing properties of ZnO nanoparticles synthesized by sol-gel process [J].

Erol, A. ;

Okur, S. ;

Comba, B. ;

Mermer, Oe ;

Arikan, M. C. .

SENSORS AND ACTUATORS B-CHEMICAL, 2010, 145 (01) :174-180

[4] Humidity sensors based on ZnO/TiO2 core/shell nanorod arrays with enhanced sensitivity [J].

Gu, Lei ;

Zheng, Kaibo ;

Zhou, Ying ;

Li, Juan ;

Mo, Xiaoliang ;

Patzke, Greta R. ;

Chen, Guorong .

SENSORS AND ACTUATORS B-CHEMICAL, 2011, 159 (01) :1-7

[5] Highly stable and sensitive humidity sensors based on quartz crystal microbalance coated with bacterial cellulose membrane [J].

Hu, Weili ;

Chen, Shiyan ;

Zhou, Bihui ;

Liu, Luting ;

Ding, Bin ;

Wang, Huaping .

SENSORS AND ACTUATORS B-CHEMICAL, 2011, 159 (01) :301-306

[6] Electrospun titanium dioxide nanofiber humidity sensors with high sensitivity [J].

Jamil, Hira ;

Batool, Syeda Sitwat ;

Imran, Zahid ;

Usman, Muhammad ;

Rafiq, M. A. ;

Willander, M. ;

Hassan, M. M. .

CERAMICS INTERNATIONAL, 2012, 38 (03) :2437-2441

[7] A highly sensitive humidity sensor based on DC reactive magnetron sputtered zinc oxide thin film [J].

Kannan, Padmanathan Karthick ;

Saraswathi, Ramiah ;

Rayappan, John Bosco Balaguru .

SENSORS AND ACTUATORS A-PHYSICAL, 2010, 164 (1-2) :8-14

[8] Humidity sensor using epoxy resin containing quaternary ammonium salts [J].

Lee, CW ;

Rhee, HW ;

Gong, MS .

SENSORS AND ACTUATORS B-CHEMICAL, 2001, 73 (2-3) :124-129

[9] Micromachine-based humidity sensors with integrated temperature sensors for signal drift compensation [J].

Lee, CY ;

Lee, GB .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (05) :620-627

[10] Humidity sensitive field effect transistors [J].

Lee, SP ;

Park, KJ .

SENSORS AND ACTUATORS B-CHEMICAL, 1996, 35 (1-3) :80-84

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