Low-loss optical waveguides and Y-branch splitters in lithium niobate fabricated by MeV oxygen ions with low dose

被引：15

作者：

Hu, Hui ^{[1
]}

Lu, Fei ^{[2
]}

Wang, Xue Lin ^{[1
]}

Chen, Feng ^{[1
]}

Wang, Ke Ming ^{[1
]}

机构：

[1] Shandong Univ, Sch Phys, Jinan 250100, Peoples R China

[2] Shandong Univ, Sch Informat Sci & Engn, Jinan 250100, Peoples R China

来源：

OPTICS EXPRESS | 2012年 / 20卷 / 19期

基金：

中国国家自然科学基金;

关键词：

REFRACTIVE-INDEX; IMPLANTATION; LINBO3; CRYSTAL;

D O I：

10.1364/OE.20.021114

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Single-mode optical waveguides in LiNbO3 substrate with loss as low as 0.17dB/cm were fabricated by a multi-energy low-dose ion implantation technology and cumulative annealing treatment. A waveguide Y-Branch splitter was demonstrated. Index profile in waveguide is described based on the ion implantation-induced damage profile, and propagation property in waveguide is simulated. Simulation results show a good consistence with the measured ones. (C) 2012 Optical Society of America

引用

页码：21114 / 21118

页数：5

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