Ultra-sensitive H2 sensors based on flame-spray-made Pd-loaded SnO2 sensing films

被引:105
作者
Liewhiran, C. [1 ,4 ]
Tamaekong, N. [2 ]
Wisitsoraat, A. [3 ]
Tuantranont, A. [3 ]
Phanichphant, S. [4 ]
机构
[1] Chiang Mai Univ, Fac Sci, Dept Phys & Mat Sci, Chiang Mai 50202, Thailand
[2] Maejo Univ, Fac Sci, Mat Sci Program, Chiang Mai 50290, Thailand
[3] Natl Elect & Comp Technol Ctr NECTEC, Nanoelect & MEMS Lab, Klongluang 12120, Pathumthani, Thailand
[4] Chiang Mai Univ, Fac Sci, Mat Sci Res Ctr, Chiang Mai 50202, Thailand
关键词
SnO2; Pd; Flame spray pyrolysis; Selectivity; H-2; sensor; OXIDE THIN-FILMS; GAS SENSOR; TIN OXIDE; ELECTRICAL-PROPERTIES; SPUTTERED FILMS; HYDROGEN; CO; TEMPERATURE; CH4; H2S;
D O I
10.1016/j.snb.2012.10.087
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
In this paper, ultra-sensitive hydrogen (H-2) gas sensors based on flame-spray-made Pd-catalyzed SnO2 nanoparticles is presented. Pd-loaded SnO2 crystalline nanoparticles with high specific surface area and well-controlled size were synthesized by flame spray pyrolysis (FSP) in one step. The particle properties were characterized by XRD, BET, SEM, TEM and EDS analyses. The H-2-sensing performances in terms of sensor response, response time and selectivity were optimized by varying Pd concentration between 0.2 and 2 wt%. An optimal Pd concentration for H-2 sensing was found to be 0.2 wt%. The optimal sensing film (0.2 wt% Pd/SnO2, 10 mu m in thickness) showed an ultra-high sensor response of similar to 10(4) to 1 vol% of H-2 at 200 degrees C and very short response time within a few seconds. Moreover, the optimum sensing temperature of Pd-loaded SnO2 films was shifted to a lower value compared with that of unloaded SnO2 film. The significant enhancement of H-2 sensing performances was attributed to highly effective spillover mechanism of well-dispersed Pd catalyst in SnO2 matrix at low Pd-loading concentration. Furthermore, the catalyst selectivity of Pd toward H-2 was found to be significantly higher than those of two other noble metals including Pt and Ru, respectively. Therefore, the flame-made 0.2 wt% Pd/SnO2 sensors is one of the most promising candidates for highly sensitive and selective detection of H-2. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码:893 / 905
页数:13
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