Vacuum pressure thermal thin-film sensor

被引：12

作者：

Berlicki, TM ^{[1
]}

Osadnik, SJ ^{[1
]}

Prociów, EL ^{[1
]}

机构：

[1] Wroclaw Tech Univ, Inst Microsyst Technol, PL-50372 Wroclaw, Poland

来源：

VACUUM | 1999年 / 53卷 / 3-4期

关键词：

D O I：

10.1016/S0042-207X(98)00343-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A fore vacuum sensor with a measuring range down to 10(-2) Pa will be described. The sensor is designed in the form of a thermopile integrated with a heater on a glass foil substrate with a thickness of 0.1 mm. The measuring range in the low pressure region has been extended by minimising the thermal radiation by using reflective coating. (C) 1999 Elsevier Science Ltd. All rights reserved.

引用

页码：373 / 376

页数：4

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